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- W2389377875 abstract "Plasma processes have been the main processes in the manufacture of SLIC. P2ID can degrade all the electrical properties of a gate oxide,which include the fixed oxide charge density,so the plasma process-induced gate oxide damage has been one of the important limitations of field and the interface state density,the leakage current and the various breakdown related parameters. This paper describes the mechanisms,two damage models and the protection solutions. At last this article analyzes some problems to be solved by further research in this field." @default.
- W2389377875 created "2016-06-24" @default.
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- W2389377875 date "2005-01-01" @default.
- W2389377875 modified "2023-09-22" @default.
- W2389377875 title "Analysis of Plasma Process-Induced Damage In Thin Gate Oxide of MOSFET" @default.
- W2389377875 hasPublicationYear "2005" @default.
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