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- W2389591185 abstract "The aerostatic bearing is one of the basic core techniques in the ultra-precision engineering,and the air-film vibration is one of the main factor affecting the manufacturing precision.A capacitive testing method for air-film thickness of aerostatic bearing is proposed,which takes the working surfaces of both the aerostatic reducer and the experiment table as two plates of the capacitive sensor.The capacitance greatly varies with the air-film thickness,thus the air-film thickness can be calculated by measuring the capacitance between them.Meanwhile, mathematical models concerning the capacitance and the air-film thickness of different concave reducer are established.In the experiments,the air-film thickness is measured by both the capacitance meter and the inductance micrometer simultaneously,and the results show that the error between two measuring values is 0.42 μm.It offers a new method for measuring the air-film thickness of the aerostatic bearing." @default.
- W2389591185 created "2016-06-24" @default.
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- W2389591185 date "2012-01-01" @default.
- W2389591185 modified "2023-09-28" @default.
- W2389591185 title "Capacitive measuring method of air-film thickness of aerostatic bearing" @default.
- W2389591185 hasPublicationYear "2012" @default.
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