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- W2389778868 abstract "A silicon-based integrated micromotor is reported in this paper.The process for this motor is very simple which includes four photolithographies,two LTO film and two LPCVD polysilicon film depositions. Both the rotor and stator are made of a 2.5μmthick polysilicon film. The gap between the stator and rotor is 2.0～2.5μm,and the radius of the rotors are 40～ 50μm, The measurements show that the minimum drive voltage is 49V and the maximum rotational speed is up to 600 rpm." @default.
- W2389778868 created "2016-06-24" @default.
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- W2389778868 date "1996-01-01" @default.
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- W2389778868 title "A Silicon-Based Integrated Micromotor" @default.
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