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- W2390326412 abstract "A series of TiAlNO thin films with different oxygen contents were deposited on high-speed(W18Cr4V) steel by RF reactive magnetron sputtering process using separate Ti and Al targets.The effects of oxygen flow rate on microstructure,microhardness,friction coefficient and wear rate were subsequently studied.The results indicated that the incorporation of(Ti,Al)N is prone to form nc-(Ti,Al)(N,O)/a-(TiO2,Al2O3) structure.With increase of oxygen flow rate the lattice parameter of nanocrystallites in thin films gradually decreases,while its preferred orientation transformes from dominant(111) to mixed(111) and(200).Simultaneously the film hardness gradually decreases.Both friction coefficient and wear rate decreases with oxygen flow rate,and their minimums are obtained at an oxygen flow rate 0.9sccm.An increase in both values is followed with further increase of oxygen flow rate.The thin films deposited at an oxygen flow rate of 0.9sccm possesse the best mechanical properties with minimum friction coefficient and high to wear-off hardness." @default.
- W2390326412 created "2016-06-24" @default.
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- W2390326412 date "2008-01-01" @default.
- W2390326412 modified "2023-10-16" @default.
- W2390326412 title "Structure and mechanical properties of TiAlNO thin films prepared by RF reactive magnetron sputtering" @default.
- W2390326412 hasPublicationYear "2008" @default.
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