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- W2390654003 abstract "In order to study and optimize the preparation process of VO2 microbolometer,the micro electromechanical system(MEMS)bulk-silicon process is employed to fabricate the VO2 microbolometer.After studying and improving the preparation process,the prepared microbolometer behaves steady structure and high yield.The responsivity,detectivity and thermal time constant of the microbolometers are measured and calculated.The results indicate that the responsivity is 34.3kV/W,the detectivity is 1.2×108 cm·Hz1/2/W,and thermal time constant is ~65.3 ms.These results achieve at the same level of similar devices at home and abroad." @default.
- W2390654003 created "2016-06-24" @default.
- W2390654003 creator A5077491495 @default.
- W2390654003 date "2009-01-01" @default.
- W2390654003 modified "2023-09-24" @default.
- W2390654003 title "Preparation of VO_2 Microbolometer Array" @default.
- W2390654003 hasPublicationYear "2009" @default.
- W2390654003 type Work @default.
- W2390654003 sameAs 2390654003 @default.
- W2390654003 citedByCount "0" @default.
- W2390654003 crossrefType "journal-article" @default.
- W2390654003 hasAuthorship W2390654003A5077491495 @default.
- W2390654003 hasConcept C119599485 @default.
- W2390654003 hasConcept C120665830 @default.
- W2390654003 hasConcept C121332964 @default.
- W2390654003 hasConcept C127413603 @default.
- W2390654003 hasConcept C153294291 @default.
- W2390654003 hasConcept C178889773 @default.
- W2390654003 hasConcept C192562407 @default.
- W2390654003 hasConcept C204530211 @default.
- W2390654003 hasConcept C21028948 @default.
- W2390654003 hasConcept C23125352 @default.
- W2390654003 hasConcept C2776111576 @default.
- W2390654003 hasConcept C37977207 @default.
- W2390654003 hasConcept C49040817 @default.
- W2390654003 hasConcept C544956773 @default.
- W2390654003 hasConcept C81370116 @default.
- W2390654003 hasConcept C94915269 @default.
- W2390654003 hasConceptScore W2390654003C119599485 @default.
- W2390654003 hasConceptScore W2390654003C120665830 @default.
- W2390654003 hasConceptScore W2390654003C121332964 @default.
- W2390654003 hasConceptScore W2390654003C127413603 @default.
- W2390654003 hasConceptScore W2390654003C153294291 @default.
- W2390654003 hasConceptScore W2390654003C178889773 @default.
- W2390654003 hasConceptScore W2390654003C192562407 @default.
- W2390654003 hasConceptScore W2390654003C204530211 @default.
- W2390654003 hasConceptScore W2390654003C21028948 @default.
- W2390654003 hasConceptScore W2390654003C23125352 @default.
- W2390654003 hasConceptScore W2390654003C2776111576 @default.
- W2390654003 hasConceptScore W2390654003C37977207 @default.
- W2390654003 hasConceptScore W2390654003C49040817 @default.
- W2390654003 hasConceptScore W2390654003C544956773 @default.
- W2390654003 hasConceptScore W2390654003C81370116 @default.
- W2390654003 hasConceptScore W2390654003C94915269 @default.
- W2390654003 hasLocation W23906540031 @default.
- W2390654003 hasOpenAccess W2390654003 @default.
- W2390654003 hasPrimaryLocation W23906540031 @default.
- W2390654003 hasRelatedWork W1578765888 @default.
- W2390654003 hasRelatedWork W1971313639 @default.
- W2390654003 hasRelatedWork W1977966841 @default.
- W2390654003 hasRelatedWork W1986178454 @default.
- W2390654003 hasRelatedWork W2010125110 @default.
- W2390654003 hasRelatedWork W2011164179 @default.
- W2390654003 hasRelatedWork W2050450890 @default.
- W2390654003 hasRelatedWork W2103201451 @default.
- W2390654003 hasRelatedWork W2115942957 @default.
- W2390654003 hasRelatedWork W2126748257 @default.
- W2390654003 hasRelatedWork W2281294558 @default.
- W2390654003 hasRelatedWork W2531911115 @default.
- W2390654003 hasRelatedWork W2624437571 @default.
- W2390654003 hasRelatedWork W2730830698 @default.
- W2390654003 hasRelatedWork W2734669983 @default.
- W2390654003 hasRelatedWork W2764713282 @default.
- W2390654003 hasRelatedWork W2921123423 @default.
- W2390654003 hasRelatedWork W2972656393 @default.
- W2390654003 hasRelatedWork W2981997625 @default.
- W2390654003 hasRelatedWork W2982647606 @default.
- W2390654003 isParatext "false" @default.
- W2390654003 isRetracted "false" @default.
- W2390654003 magId "2390654003" @default.
- W2390654003 workType "article" @default.