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- W2391520525 abstract "To correct measurement error of the optical thin film parameter measured by singal wavelengh ellipsometer,the error source of ellipsometer measuring film refractive index and thickness is analyzed base on metrical theory.The results show the primary infections are the start error δp of polarizing plate P and numerical value error δ2 of quarter-wave plate with 45° diviation.Preferable corrected results are obtained from experiment measurements and the correctional ratio is 1.7%." @default.
- W2391520525 created "2016-06-24" @default.
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- W2391520525 date "2008-01-01" @default.
- W2391520525 modified "2023-09-23" @default.
- W2391520525 title "Correction of Measurement Error of Ellipsometer" @default.
- W2391520525 hasPublicationYear "2008" @default.
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