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- W2391570687 abstract "β-C_3N_4, as predicted theoretically by Cohen et al, is a material that may have higher hardness than diamond. The carbon nitride films containing β-C_3N_4 have superior electrical, optical and mechanical properties and are promising in many fields. Many ways for preparation of carbon nitride films are available, but the application of plasma technology to deposition of carbon nitride films is discussed here in particular the deposition rate and film formation. The previous works are also reviewed, focusing on the effects of several parameters in deposition process on deposition rate and film formation." @default.
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- W2391570687 title "Applications of plasma technology to deposition of carbon nitride films" @default.
- W2391570687 hasPublicationYear "2004" @default.
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