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- W2391574807 abstract "In integrated circuits,the defects associated with photolithography are assumed to be the shape of circular discs in order to perform the estimation of yield and fault analysis.However,the shape of 70% real defects approximates elliptical shapes.This paper provides a yield model caused by elliptical defects.The model is more general than that of the circular defect as the model is only an instance of the new model.A comparison result between the two models in experiment shows that the new model may predict the yield caused by real defects more accurately than the circular model does,which is of significance for the prediction and improvement of the yield." @default.
- W2391574807 created "2016-06-24" @default.
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- W2391574807 date "2006-01-01" @default.
- W2391574807 modified "2023-09-25" @default.
- W2391574807 title "Estimation of yield associated with elliptical defect" @default.
- W2391574807 hasPublicationYear "2006" @default.
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