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- W2392100355 abstract "In the Micro Electro-Mechanical System(MEMS)field,the traditional electrostatic micro actuator of transverse loading and unidirectional deformation is faces problems of the oversized voltage and undersized displacement.An electrostatic silicon micro actuator featuring large-displacement and low-voltage is presented.Displacement amplification coefficientδis derived based on the principle of verticallyhorizontally bending.Simulation results show that the drive mechanism of the vertically-horizontally bending micro actuator is to amplify the deformation of unidirectional transverse loading by the displacement amplification coefficientδ.The purpose of large-displacement at low-driving voltage is realized.The effects of electrostatic adjustment force,temperature stress and extruding force on micro beam deformation are analyzed,respectively.Simulation shows that when the driving voltage is 5V,the output displacement is as high as 17.5μm.The deformation is much larger than that of the traditional micro actuator of transverse loading and unidirectional deformation." @default.
- W2392100355 created "2016-06-24" @default.
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- W2392100355 date "2014-01-01" @default.
- W2392100355 modified "2023-09-25" @default.
- W2392100355 title "Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending" @default.
- W2392100355 hasPublicationYear "2014" @default.
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