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- W2392130278 abstract "It is important to analyze the phenomenon and mechanism of the way the voltages,resonant waves and frequencies influence are on the ion energy distributions(IEDs) from multiple frequencies driven in capacitive discharges in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics.The paper focuses on the function of the ion energy distributions under high and low frequencies(dual frequency) drive in capacitive discharges and derived a model of computation of the multiple frequencies driven IEDs from analyzing theories.The model can analyze and predict the IEDs under different high and low frequencies driven,the results from the model are in good agreement with the important data in public magazines." @default.
- W2392130278 created "2016-06-24" @default.
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- W2392130278 date "2012-01-01" @default.
- W2392130278 modified "2023-09-28" @default.
- W2392130278 title "Effects on ion energy distribution of multiple frequencies' driven" @default.
- W2392130278 hasPublicationYear "2012" @default.
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