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- W2392335596 abstract "This article presents an optical non contact method to measure micro vibration.It is an optical measuring system with a spherical Fabry Perot interferometer to detect the solid surface micro vibration.Compared with conventional methods,this system have many advantages,such as non contact,sensitivity,high bandwidth,high spatial resolution,and so on.It is easy to realize rapid scanning and automatic measurement.A 5 MHz micro vibration waveform can be monitored with this system.The optical feedback system is used to adjust the cavity length of interferometer in order to eliminate interferences." @default.
- W2392335596 created "2016-06-24" @default.
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- W2392335596 date "2001-01-01" @default.
- W2392335596 modified "2023-09-23" @default.
- W2392335596 title "MICRO-VIBRATION MEASUREMENT USING FABRY PEROT INTERFEROMETER" @default.
- W2392335596 hasPublicationYear "2001" @default.
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