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- W2393042548 abstract "The mechanical properties of MEMS materials have much influence on the performance, reliability and service life of MEMS, which may not be characterized by those of large volume materials owing to the small sizes of MEMS components and can be measured by using such measuring methods as nanoindentation, cantilever beams and bulge test. Among them, nanoindentation is the most widely used one since most of the properties can be measured by it and there is not much special request for the sizes and forms of samples. Through thorough analysis of the principle of nanoindentation and several evaluation models of hardness and elastic modulus, the main influence factors on the measuring uncertainties were classified, which may lead to the confusion of the application of the properties in the design of MEMS. Based on the classification of the influence factors, a framework of the standardization related to measuring instruments, samples, indenters, measuring conditions and evaluation models was plotted. For the measuring instruments, the standardization mainly consists of two parts, that is, the measuring system of displacement and load and the indenters, so the uncertainties of signal sensing and data sampling should be specified, and such standardized parameters as geometric sizes and tolerances, formal tolerances, materials and installation of different kinds of indenters were proposed. For the measuring conditions and samples, the main task of standardization is that a series of measuring parameters such as temperature, loading and unloading speeds, holding time at maximum load, maximum load or depth, minimum distance between neighboring indented points and so on should be normalized, and the sizes, surface roughness and structure forms of samples should also be classified according to R 10 series of preferred numbers or other rules. The standardization of evaluation models is a very complicated and difficult problem, so it was suggested that the initially standardized series of evaluation models be established based on several most widely used models, and through a lot of series experiments under the international cooperation among researchers on MEMS products, MEMS materials and nanoindenters, the series of evaluation models for different kinds of indenters and structures of samples may be standardized." @default.
- W2393042548 created "2016-06-24" @default.
- W2393042548 creator A5080567036 @default.
- W2393042548 date "2001-01-01" @default.
- W2393042548 modified "2023-09-25" @default.
- W2393042548 title "SOME IDEAS OF STANDARDIZATION OF MEASUREMENT AND EVALUATION OF MEMS MATERIALS' MECHANICAL PROPERTIES USING NANOINDENTATION" @default.
- W2393042548 hasPublicationYear "2001" @default.
- W2393042548 type Work @default.
- W2393042548 sameAs 2393042548 @default.
- W2393042548 citedByCount "1" @default.
- W2393042548 crossrefType "journal-article" @default.
- W2393042548 hasAuthorship W2393042548A5080567036 @default.
- W2393042548 hasConcept C107551265 @default.
- W2393042548 hasConcept C111919701 @default.
- W2393042548 hasConcept C121332964 @default.
- W2393042548 hasConcept C127413603 @default.
- W2393042548 hasConcept C141354745 @default.
- W2393042548 hasConcept C15744967 @default.
- W2393042548 hasConcept C159985019 @default.
- W2393042548 hasConcept C163258240 @default.
- W2393042548 hasConcept C171250308 @default.
- W2393042548 hasConcept C188087704 @default.
- W2393042548 hasConcept C192562407 @default.
- W2393042548 hasConcept C37977207 @default.
- W2393042548 hasConcept C41008148 @default.
- W2393042548 hasConcept C43214815 @default.
- W2393042548 hasConcept C49326732 @default.
- W2393042548 hasConcept C542102704 @default.
- W2393042548 hasConcept C62520636 @default.
- W2393042548 hasConcept C66938386 @default.
- W2393042548 hasConcept C78519656 @default.
- W2393042548 hasConceptScore W2393042548C107551265 @default.
- W2393042548 hasConceptScore W2393042548C111919701 @default.
- W2393042548 hasConceptScore W2393042548C121332964 @default.
- W2393042548 hasConceptScore W2393042548C127413603 @default.
- W2393042548 hasConceptScore W2393042548C141354745 @default.
- W2393042548 hasConceptScore W2393042548C15744967 @default.
- W2393042548 hasConceptScore W2393042548C159985019 @default.
- W2393042548 hasConceptScore W2393042548C163258240 @default.
- W2393042548 hasConceptScore W2393042548C171250308 @default.
- W2393042548 hasConceptScore W2393042548C188087704 @default.
- W2393042548 hasConceptScore W2393042548C192562407 @default.
- W2393042548 hasConceptScore W2393042548C37977207 @default.
- W2393042548 hasConceptScore W2393042548C41008148 @default.
- W2393042548 hasConceptScore W2393042548C43214815 @default.
- W2393042548 hasConceptScore W2393042548C49326732 @default.
- W2393042548 hasConceptScore W2393042548C542102704 @default.
- W2393042548 hasConceptScore W2393042548C62520636 @default.
- W2393042548 hasConceptScore W2393042548C66938386 @default.
- W2393042548 hasConceptScore W2393042548C78519656 @default.
- W2393042548 hasLocation W23930425481 @default.
- W2393042548 hasOpenAccess W2393042548 @default.
- W2393042548 hasPrimaryLocation W23930425481 @default.
- W2393042548 hasRelatedWork W1507931070 @default.
- W2393042548 hasRelatedWork W1809140081 @default.
- W2393042548 hasRelatedWork W1948323525 @default.
- W2393042548 hasRelatedWork W1960581027 @default.
- W2393042548 hasRelatedWork W1999178577 @default.
- W2393042548 hasRelatedWork W2010285116 @default.
- W2393042548 hasRelatedWork W2019332450 @default.
- W2393042548 hasRelatedWork W2019554563 @default.
- W2393042548 hasRelatedWork W2064615861 @default.
- W2393042548 hasRelatedWork W2068473829 @default.
- W2393042548 hasRelatedWork W2091614090 @default.
- W2393042548 hasRelatedWork W2131163405 @default.
- W2393042548 hasRelatedWork W2150519646 @default.
- W2393042548 hasRelatedWork W2387650593 @default.
- W2393042548 hasRelatedWork W2466248178 @default.
- W2393042548 hasRelatedWork W2791595739 @default.
- W2393042548 hasRelatedWork W299000103 @default.
- W2393042548 hasRelatedWork W3010755684 @default.
- W2393042548 hasRelatedWork W3093188312 @default.
- W2393042548 hasRelatedWork W866724003 @default.
- W2393042548 isParatext "false" @default.
- W2393042548 isRetracted "false" @default.
- W2393042548 magId "2393042548" @default.
- W2393042548 workType "article" @default.