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- W2393077682 abstract "Diamond-like carbon films were synthesized under atmospheric pressure(AP-DLC)and their gas barrier properties and hardness were measured.The AP-DLC films were uniformly obtained by RF-plasma CVD method at room temperature with a size of 450mm2.The growth rate increased as a function of C 2 H 2 concentration and the average growth rate was around 12μm/min.The maximum deposition rate was~1μm/s,which is approximately 2000 times larger than that by low-pressure plasma CVD of 1–2μm/h.The gas barrier properties of AP-DLC films,~1μm thick,were 5–10 times larger than those of uncoated PET substrates.The micro-hardness of AP-DLC films was around 3 GPa,measured by the nano-indentation method.The issue lies in the removal of macro-particles of the films to improve the micro-hardness and the surface roughness. In this paper,we report the physical properties of DLC films synthesized under atmospheric pressure by the radio frequency CVD method.We also summarize a brief history of PET bottle coating by vacuum-DLC films,as well as that of the development of atmospheric pressure technology and related DLC films,focused on gas barrier properties and micro- hardness." @default.
- W2393077682 created "2016-06-24" @default.
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- W2393077682 date "2009-01-01" @default.
- W2393077682 modified "2023-09-23" @default.
- W2393077682 title "Diamond-like Carbon Films Synthesized under Atmospheric Pressure Synthesized on PET Substrates" @default.
- W2393077682 hasPublicationYear "2009" @default.
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