Matches in SemOpenAlex for { <https://semopenalex.org/work/W2393079529> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2393079529 abstract "The electromigration(EM) reliability of Cu interconnects is closely related with the grain structure,geometric structures,technology and dielectric materials.The interconnect line samples with and without extension were produced in this paper.Failure acceleration tests were carried out on the samples.The result of the tests shows the interconnect lines with extension have longer lifetime and better EM reliability.The failure mode of the structure with extension is discussed.Based on the process,it is pointed out that interconnects EM performance can be improved effectively by using the structure with extension.The factors,which affect the reliability,won't be introduced with the application of the structure with extension.Therefore,it is an effective method to improve the Cu interconnects EM reliability." @default.
- W2393079529 created "2016-06-24" @default.
- W2393079529 creator A5067368540 @default.
- W2393079529 date "2009-01-01" @default.
- W2393079529 modified "2023-09-23" @default.
- W2393079529 title "The Evaluation on Electromigration Reliability of Copper Interconnect Structures with Extension" @default.
- W2393079529 hasPublicationYear "2009" @default.
- W2393079529 type Work @default.
- W2393079529 sameAs 2393079529 @default.
- W2393079529 citedByCount "0" @default.
- W2393079529 crossrefType "journal-article" @default.
- W2393079529 hasAuthorship W2393079529A5067368540 @default.
- W2393079529 hasConcept C116372231 @default.
- W2393079529 hasConcept C121332964 @default.
- W2393079529 hasConcept C123745756 @default.
- W2393079529 hasConcept C127413603 @default.
- W2393079529 hasConcept C138055206 @default.
- W2393079529 hasConcept C159985019 @default.
- W2393079529 hasConcept C163258240 @default.
- W2393079529 hasConcept C192562407 @default.
- W2393079529 hasConcept C199360897 @default.
- W2393079529 hasConcept C200601418 @default.
- W2393079529 hasConcept C24326235 @default.
- W2393079529 hasConcept C2778029271 @default.
- W2393079529 hasConcept C2779866884 @default.
- W2393079529 hasConcept C31258907 @default.
- W2393079529 hasConcept C41008148 @default.
- W2393079529 hasConcept C43214815 @default.
- W2393079529 hasConcept C62520636 @default.
- W2393079529 hasConcept C66283442 @default.
- W2393079529 hasConceptScore W2393079529C116372231 @default.
- W2393079529 hasConceptScore W2393079529C121332964 @default.
- W2393079529 hasConceptScore W2393079529C123745756 @default.
- W2393079529 hasConceptScore W2393079529C127413603 @default.
- W2393079529 hasConceptScore W2393079529C138055206 @default.
- W2393079529 hasConceptScore W2393079529C159985019 @default.
- W2393079529 hasConceptScore W2393079529C163258240 @default.
- W2393079529 hasConceptScore W2393079529C192562407 @default.
- W2393079529 hasConceptScore W2393079529C199360897 @default.
- W2393079529 hasConceptScore W2393079529C200601418 @default.
- W2393079529 hasConceptScore W2393079529C24326235 @default.
- W2393079529 hasConceptScore W2393079529C2778029271 @default.
- W2393079529 hasConceptScore W2393079529C2779866884 @default.
- W2393079529 hasConceptScore W2393079529C31258907 @default.
- W2393079529 hasConceptScore W2393079529C41008148 @default.
- W2393079529 hasConceptScore W2393079529C43214815 @default.
- W2393079529 hasConceptScore W2393079529C62520636 @default.
- W2393079529 hasConceptScore W2393079529C66283442 @default.
- W2393079529 hasLocation W23930795291 @default.
- W2393079529 hasOpenAccess W2393079529 @default.
- W2393079529 hasPrimaryLocation W23930795291 @default.
- W2393079529 hasRelatedWork W1568113781 @default.
- W2393079529 hasRelatedWork W1978838828 @default.
- W2393079529 hasRelatedWork W1983731832 @default.
- W2393079529 hasRelatedWork W1989564218 @default.
- W2393079529 hasRelatedWork W2049648424 @default.
- W2393079529 hasRelatedWork W2071696052 @default.
- W2393079529 hasRelatedWork W2078485804 @default.
- W2393079529 hasRelatedWork W2095918333 @default.
- W2393079529 hasRelatedWork W2097958857 @default.
- W2393079529 hasRelatedWork W2312905693 @default.
- W2393079529 hasRelatedWork W2544332937 @default.
- W2393079529 hasRelatedWork W2805163948 @default.
- W2393079529 hasRelatedWork W3083524975 @default.
- W2393079529 hasRelatedWork W3096354130 @default.
- W2393079529 hasRelatedWork W3107297308 @default.
- W2393079529 hasRelatedWork W3162582591 @default.
- W2393079529 hasRelatedWork W612728234 @default.
- W2393079529 hasRelatedWork W94455562 @default.
- W2393079529 hasRelatedWork W2836644840 @default.
- W2393079529 hasRelatedWork W3027504736 @default.
- W2393079529 isParatext "false" @default.
- W2393079529 isRetracted "false" @default.
- W2393079529 magId "2393079529" @default.
- W2393079529 workType "article" @default.