Matches in SemOpenAlex for { <https://semopenalex.org/work/W2393520512> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W2393520512 abstract "The experiments of micro-machining metal and semico nd uctor pieces by 248nm KrF excimer laser direct etching are carried out. Transver se affect zone is observed on the machined samples’surface. It includes two re gions which are described by their dimension and color. The relationship between the regions and the parameters of the laser are studied. The measures to reduce the transverse affect zone are also provided based on the results of the experi ments." @default.
- W2393520512 created "2016-06-24" @default.
- W2393520512 creator A5011472059 @default.
- W2393520512 date "2005-01-01" @default.
- W2393520512 modified "2023-09-26" @default.
- W2393520512 title "Experimental study on transverse affect zone in excimer laser direct etching" @default.
- W2393520512 hasPublicationYear "2005" @default.
- W2393520512 type Work @default.
- W2393520512 sameAs 2393520512 @default.
- W2393520512 citedByCount "0" @default.
- W2393520512 crossrefType "journal-article" @default.
- W2393520512 hasAuthorship W2393520512A5011472059 @default.
- W2393520512 hasConcept C100460472 @default.
- W2393520512 hasConcept C120665830 @default.
- W2393520512 hasConcept C121332964 @default.
- W2393520512 hasConcept C127413603 @default.
- W2393520512 hasConcept C154954056 @default.
- W2393520512 hasConcept C159985019 @default.
- W2393520512 hasConcept C191897082 @default.
- W2393520512 hasConcept C192562407 @default.
- W2393520512 hasConcept C2779227376 @default.
- W2393520512 hasConcept C2780477314 @default.
- W2393520512 hasConcept C49040817 @default.
- W2393520512 hasConcept C520434653 @default.
- W2393520512 hasConcept C523214423 @default.
- W2393520512 hasConcept C66938386 @default.
- W2393520512 hasConcept C74561354 @default.
- W2393520512 hasConceptScore W2393520512C100460472 @default.
- W2393520512 hasConceptScore W2393520512C120665830 @default.
- W2393520512 hasConceptScore W2393520512C121332964 @default.
- W2393520512 hasConceptScore W2393520512C127413603 @default.
- W2393520512 hasConceptScore W2393520512C154954056 @default.
- W2393520512 hasConceptScore W2393520512C159985019 @default.
- W2393520512 hasConceptScore W2393520512C191897082 @default.
- W2393520512 hasConceptScore W2393520512C192562407 @default.
- W2393520512 hasConceptScore W2393520512C2779227376 @default.
- W2393520512 hasConceptScore W2393520512C2780477314 @default.
- W2393520512 hasConceptScore W2393520512C49040817 @default.
- W2393520512 hasConceptScore W2393520512C520434653 @default.
- W2393520512 hasConceptScore W2393520512C523214423 @default.
- W2393520512 hasConceptScore W2393520512C66938386 @default.
- W2393520512 hasConceptScore W2393520512C74561354 @default.
- W2393520512 hasLocation W23935205121 @default.
- W2393520512 hasOpenAccess W2393520512 @default.
- W2393520512 hasPrimaryLocation W23935205121 @default.
- W2393520512 hasRelatedWork W1480838660 @default.
- W2393520512 hasRelatedWork W1821308268 @default.
- W2393520512 hasRelatedWork W1978646336 @default.
- W2393520512 hasRelatedWork W2001472761 @default.
- W2393520512 hasRelatedWork W2003662273 @default.
- W2393520512 hasRelatedWork W2010216089 @default.
- W2393520512 hasRelatedWork W2042767999 @default.
- W2393520512 hasRelatedWork W2047902839 @default.
- W2393520512 hasRelatedWork W2058311289 @default.
- W2393520512 hasRelatedWork W2065089000 @default.
- W2393520512 hasRelatedWork W2073922040 @default.
- W2393520512 hasRelatedWork W2080637362 @default.
- W2393520512 hasRelatedWork W2160189107 @default.
- W2393520512 hasRelatedWork W2164442589 @default.
- W2393520512 hasRelatedWork W2246428268 @default.
- W2393520512 hasRelatedWork W2247296181 @default.
- W2393520512 hasRelatedWork W2352692926 @default.
- W2393520512 hasRelatedWork W2378461262 @default.
- W2393520512 hasRelatedWork W2891077709 @default.
- W2393520512 hasRelatedWork W3200676172 @default.
- W2393520512 isParatext "false" @default.
- W2393520512 isRetracted "false" @default.
- W2393520512 magId "2393520512" @default.
- W2393520512 workType "article" @default.