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- W2393557773 abstract "Porous silicon (PS) was formed on the surface of silicon wafer by electrochemical etching method under different current densities. In order to form VOx/PS/Si structure, vanadium oxide thin films were deposited on PS surface utilizing novel facing targets DC reactive sputtering technique. Field emission scanning electron microscope (FESEM) was utilized to observe the microstructure of PS and VOx/PS/Si structure, the nano-mechanical property of VOx/PS/Si structure was studied by nanoindentor instrument, and the temperature sensitive property was analyzed with resistance-power curves. The results showed that the average pore sizes of PS samples prepared under current densities of 40 and 80 mA·cm-2 were 18 and 24 nm, and the thermal conductivities tested by micro Raman spectroscopy were 3.282 and 1.278 kW·K-1, respectively. The average speeds of resistance varying with power for VOx/PS/Si structure were 60×109 and 100×109 Ω·W-1, and the nano-hardness were 1.917 and 0.928 GPa, respectively. The experimental results indicated that the microstructure of PS had great influence on the nano-mechanical property and temperature sensitivity of VOx/PS/Si structure; this structure formed on PS with high porosity had better temperature sensitivity than PS with low porosity, but a worse mechanical stability." @default.
- W2393557773 created "2016-06-24" @default.
- W2393557773 creator A5081404817 @default.
- W2393557773 date "2008-01-01" @default.
- W2393557773 modified "2023-09-25" @default.
- W2393557773 title "Microstructure, Nano-Mechanical and Temperature Sensitive Properties of VOx/Porous Silicon/Si Structure" @default.
- W2393557773 hasPublicationYear "2008" @default.
- W2393557773 type Work @default.
- W2393557773 sameAs 2393557773 @default.
- W2393557773 citedByCount "0" @default.
- W2393557773 crossrefType "journal-article" @default.
- W2393557773 hasAuthorship W2393557773A5081404817 @default.
- W2393557773 hasConcept C100460472 @default.
- W2393557773 hasConcept C113196181 @default.
- W2393557773 hasConcept C120665830 @default.
- W2393557773 hasConcept C121332964 @default.
- W2393557773 hasConcept C127413603 @default.
- W2393557773 hasConcept C159985019 @default.
- W2393557773 hasConcept C160671074 @default.
- W2393557773 hasConcept C171250308 @default.
- W2393557773 hasConcept C185592680 @default.
- W2393557773 hasConcept C19067145 @default.
- W2393557773 hasConcept C192562407 @default.
- W2393557773 hasConcept C22423302 @default.
- W2393557773 hasConcept C26771246 @default.
- W2393557773 hasConcept C2776685891 @default.
- W2393557773 hasConcept C2779227376 @default.
- W2393557773 hasConcept C2780357685 @default.
- W2393557773 hasConcept C40003534 @default.
- W2393557773 hasConcept C42360764 @default.
- W2393557773 hasConcept C43617362 @default.
- W2393557773 hasConcept C49040817 @default.
- W2393557773 hasConcept C544956773 @default.
- W2393557773 hasConcept C59061564 @default.
- W2393557773 hasConcept C6648577 @default.
- W2393557773 hasConcept C87976508 @default.
- W2393557773 hasConceptScore W2393557773C100460472 @default.
- W2393557773 hasConceptScore W2393557773C113196181 @default.
- W2393557773 hasConceptScore W2393557773C120665830 @default.
- W2393557773 hasConceptScore W2393557773C121332964 @default.
- W2393557773 hasConceptScore W2393557773C127413603 @default.
- W2393557773 hasConceptScore W2393557773C159985019 @default.
- W2393557773 hasConceptScore W2393557773C160671074 @default.
- W2393557773 hasConceptScore W2393557773C171250308 @default.
- W2393557773 hasConceptScore W2393557773C185592680 @default.
- W2393557773 hasConceptScore W2393557773C19067145 @default.
- W2393557773 hasConceptScore W2393557773C192562407 @default.
- W2393557773 hasConceptScore W2393557773C22423302 @default.
- W2393557773 hasConceptScore W2393557773C26771246 @default.
- W2393557773 hasConceptScore W2393557773C2776685891 @default.
- W2393557773 hasConceptScore W2393557773C2779227376 @default.
- W2393557773 hasConceptScore W2393557773C2780357685 @default.
- W2393557773 hasConceptScore W2393557773C40003534 @default.
- W2393557773 hasConceptScore W2393557773C42360764 @default.
- W2393557773 hasConceptScore W2393557773C43617362 @default.
- W2393557773 hasConceptScore W2393557773C49040817 @default.
- W2393557773 hasConceptScore W2393557773C544956773 @default.
- W2393557773 hasConceptScore W2393557773C59061564 @default.
- W2393557773 hasConceptScore W2393557773C6648577 @default.
- W2393557773 hasConceptScore W2393557773C87976508 @default.
- W2393557773 hasLocation W23935577731 @default.
- W2393557773 hasOpenAccess W2393557773 @default.
- W2393557773 hasPrimaryLocation W23935577731 @default.
- W2393557773 hasRelatedWork W1961928844 @default.
- W2393557773 hasRelatedWork W1982839889 @default.
- W2393557773 hasRelatedWork W1991522415 @default.
- W2393557773 hasRelatedWork W2003016027 @default.
- W2393557773 hasRelatedWork W2003296184 @default.
- W2393557773 hasRelatedWork W2024140850 @default.
- W2393557773 hasRelatedWork W2046196065 @default.
- W2393557773 hasRelatedWork W2060372280 @default.
- W2393557773 hasRelatedWork W2065207030 @default.
- W2393557773 hasRelatedWork W2090245590 @default.
- W2393557773 hasRelatedWork W2144239732 @default.
- W2393557773 hasRelatedWork W2184627232 @default.
- W2393557773 hasRelatedWork W2345233701 @default.
- W2393557773 hasRelatedWork W2371826485 @default.
- W2393557773 hasRelatedWork W2469421225 @default.
- W2393557773 hasRelatedWork W2478811563 @default.
- W2393557773 hasRelatedWork W2507696357 @default.
- W2393557773 hasRelatedWork W2606118560 @default.
- W2393557773 hasRelatedWork W2765275555 @default.
- W2393557773 hasRelatedWork W2918970685 @default.
- W2393557773 isParatext "false" @default.
- W2393557773 isRetracted "false" @default.
- W2393557773 magId "2393557773" @default.
- W2393557773 workType "article" @default.