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- W2393669924 abstract "Overview of MEMS technology and MEMS devices in the field of information,sensor field,the field of biotechnology applications,highlighting MEMS in biomedical application and future development trends." @default.
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- W2393669924 date "2011-01-01" @default.
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- W2393669924 title "MEMS Devices and Their Applications in Biomedical" @default.
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