Matches in SemOpenAlex for { <https://semopenalex.org/work/W2393887688> ?p ?o ?g. }
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- W2393887688 endingPage "405301" @default.
- W2393887688 startingPage "405301" @default.
- W2393887688 abstract "The group III–V material aluminium nitride (AlN) is frequently used in micro-electromechanical devices and systems (MEMS) due to its piezoelectric properties, its high thermal and electrical stability as well as its compatibility with CMOS technology. But, the trend towards miniaturization of MEMS devices requests a continuous decrease in geometrical dimensions of the active AlN thin film, thus demanding at least the same piezoelectric properties at lower film thickness. In this work, two different approaches are applied to measure the piezoelectric coefficients, using the direct as well as the converse piezoelectric effect. The first approach utilizes laser doppler vibrometry measurements in combination with finite element analysis, allowing the determination of d 33 and d 31. For the second method, an oscillating force is applied to the thin film and the generated charge is measured. A surface-near substrate conditioning step applying sputter etching is used in order to improve the piezoelectric coefficients over a wide thickness range (i.e. 40 nm to 400 nm) by about 20% compared to samples without pre-treatment. Basically, the coefficients remain constant for a film thickness of 100 nm and above, thus allowing the application of thin active layers of aluminium nitride without any reduction in the sensing and actuation potential." @default.
- W2393887688 created "2016-06-24" @default.
- W2393887688 creator A5011957337 @default.
- W2393887688 creator A5017133878 @default.
- W2393887688 creator A5063768208 @default.
- W2393887688 date "2015-09-17" @default.
- W2393887688 modified "2023-09-26" @default.
- W2393887688 title "Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface" @default.
- W2393887688 cites W1975457067 @default.
- W2393887688 cites W1988009429 @default.
- W2393887688 cites W1997419593 @default.
- W2393887688 cites W1997860731 @default.
- W2393887688 cites W2000643129 @default.
- W2393887688 cites W2003189225 @default.
- W2393887688 cites W2018409502 @default.
- W2393887688 cites W2026648097 @default.
- W2393887688 cites W2028803173 @default.
- W2393887688 cites W2030664155 @default.
- W2393887688 cites W2032261336 @default.
- W2393887688 cites W2033155989 @default.
- W2393887688 cites W2041690766 @default.
- W2393887688 cites W2067470147 @default.
- W2393887688 cites W2069253014 @default.
- W2393887688 cites W2109872583 @default.
- W2393887688 cites W2149961875 @default.
- W2393887688 cites W4234198497 @default.
- W2393887688 doi "https://doi.org/10.1088/0022-3727/48/40/405301" @default.
- W2393887688 hasPublicationYear "2015" @default.
- W2393887688 type Work @default.
- W2393887688 sameAs 2393887688 @default.
- W2393887688 citedByCount "19" @default.
- W2393887688 countsByYear W23938876882015 @default.
- W2393887688 countsByYear W23938876882017 @default.
- W2393887688 countsByYear W23938876882018 @default.
- W2393887688 countsByYear W23938876882019 @default.
- W2393887688 countsByYear W23938876882020 @default.
- W2393887688 countsByYear W23938876882021 @default.
- W2393887688 countsByYear W23938876882022 @default.
- W2393887688 countsByYear W23938876882023 @default.
- W2393887688 crossrefType "journal-article" @default.
- W2393887688 hasAuthorship W2393887688A5011957337 @default.
- W2393887688 hasAuthorship W2393887688A5017133878 @default.
- W2393887688 hasAuthorship W2393887688A5063768208 @default.
- W2393887688 hasConcept C100082104 @default.
- W2393887688 hasConcept C159985019 @default.
- W2393887688 hasConcept C171250308 @default.
- W2393887688 hasConcept C19067145 @default.
- W2393887688 hasConcept C192562407 @default.
- W2393887688 hasConcept C194760766 @default.
- W2393887688 hasConcept C22423302 @default.
- W2393887688 hasConcept C2524010 @default.
- W2393887688 hasConcept C2776799497 @default.
- W2393887688 hasConcept C2777431650 @default.
- W2393887688 hasConcept C2779227376 @default.
- W2393887688 hasConcept C2780162792 @default.
- W2393887688 hasConcept C33923547 @default.
- W2393887688 hasConcept C49040817 @default.
- W2393887688 hasConcept C513153333 @default.
- W2393887688 hasConcept C544956773 @default.
- W2393887688 hasConceptScore W2393887688C100082104 @default.
- W2393887688 hasConceptScore W2393887688C159985019 @default.
- W2393887688 hasConceptScore W2393887688C171250308 @default.
- W2393887688 hasConceptScore W2393887688C19067145 @default.
- W2393887688 hasConceptScore W2393887688C192562407 @default.
- W2393887688 hasConceptScore W2393887688C194760766 @default.
- W2393887688 hasConceptScore W2393887688C22423302 @default.
- W2393887688 hasConceptScore W2393887688C2524010 @default.
- W2393887688 hasConceptScore W2393887688C2776799497 @default.
- W2393887688 hasConceptScore W2393887688C2777431650 @default.
- W2393887688 hasConceptScore W2393887688C2779227376 @default.
- W2393887688 hasConceptScore W2393887688C2780162792 @default.
- W2393887688 hasConceptScore W2393887688C33923547 @default.
- W2393887688 hasConceptScore W2393887688C49040817 @default.
- W2393887688 hasConceptScore W2393887688C513153333 @default.
- W2393887688 hasConceptScore W2393887688C544956773 @default.
- W2393887688 hasIssue "40" @default.
- W2393887688 hasLocation W23938876881 @default.
- W2393887688 hasOpenAccess W2393887688 @default.
- W2393887688 hasPrimaryLocation W23938876881 @default.
- W2393887688 hasRelatedWork W194636971 @default.
- W2393887688 hasRelatedWork W1966178535 @default.
- W2393887688 hasRelatedWork W1975186683 @default.
- W2393887688 hasRelatedWork W1986319772 @default.
- W2393887688 hasRelatedWork W2000919590 @default.
- W2393887688 hasRelatedWork W2003563627 @default.
- W2393887688 hasRelatedWork W2024908392 @default.
- W2393887688 hasRelatedWork W2035920173 @default.
- W2393887688 hasRelatedWork W2155463508 @default.
- W2393887688 hasRelatedWork W2393887688 @default.
- W2393887688 hasVolume "48" @default.
- W2393887688 isParatext "false" @default.
- W2393887688 isRetracted "false" @default.
- W2393887688 magId "2393887688" @default.
- W2393887688 workType "article" @default.