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- W2394277386 abstract "PECVD is introduced in this paper.A method of temperature control based on PLC and touch panel is analyzed.This method improves the automatic control level of PECVD and ensures the repeatability and stability of the process." @default.
- W2394277386 created "2016-06-24" @default.
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- W2394277386 date "2006-01-01" @default.
- W2394277386 modified "2023-09-26" @default.
- W2394277386 title "Temperature Control of Plasma Enhanced Chemical Vapor Deposit(PECVD)" @default.
- W2394277386 hasPublicationYear "2006" @default.
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