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- W2394311198 abstract "The paper introduces the small quantity throughput production and diaphragm pump system from the overall structure and the hardware design,to analysis the working principle、circulation mechanism、hardware control and drive circuit of the diaphragm pump,pointing out causing the current drift in the humidity factory and the method how to fix it;To analysis the centralized slurry supply system from the overall structure,and to analysis its mixing center which include temperature control、bearingless magnetically levitated centrifugal pump and its circulating mechanism;Compare with the diaphragm pump and the bearingless magnetically levitated centrifugal pump on particle aggregation,and analysis of the both systems applicable situation and condition." @default.
- W2394311198 created "2016-06-24" @default.
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- W2394311198 date "2013-01-01" @default.
- W2394311198 modified "2023-09-25" @default.
- W2394311198 title "Study on the CMP Slurry Supply and Distribution System" @default.
- W2394311198 hasPublicationYear "2013" @default.
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