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- W2394388655 abstract "A new dielectric film-SiOP was grown on InGaAsP/InP multi-quantum wells (MQW) structure by plasma enhanced chemical vapor deposition (PECVD). The structure of SiOP was investigated by X-ray photo spectroscopy (XPS) and the band gap of MQW laser structure was measured by photoluminescence (PL). The results of XPS showed that there were (Si)O and PO bonds in SiOP film and the energy of P(2p) state was 134.6 eV. The largest band gap blue shift of 223.6 meV was obtained by encapsulated SiOP film following rapid thermal annealing (RTA). This structure could be used in photon integrated circuits (PIC's) and optoelectronic integrated circuits (OEIC's)." @default.
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- W2394388655 date "2003-01-01" @default.
- W2394388655 modified "2023-09-27" @default.
- W2394388655 title "SiOP Dielectric Film and Its Effects on Band Gap Intermixing of InGaAsP/InP Multi-quantum Wells Laser Structure" @default.
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