Matches in SemOpenAlex for { <https://semopenalex.org/work/W2398583174> ?p ?o ?g. }
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- W2398583174 endingPage "1619" @default.
- W2398583174 startingPage "1615" @default.
- W2398583174 abstract "This study introduces a novel method to measure C(V) characteristics of local MOS structures based on scanning probe microscopy (SPM) techniques. The new method operates in intermittent-contact (IC) mode and combines both the advantages of contact mode C(V) spectroscopy and intermittent-contact scanning capacitance microscopy. As a consequence, on the one hand dopant concentration and dopant type can be indicated simultaneously, on the other hand tip wear is reduced significantly." @default.
- W2398583174 created "2016-06-24" @default.
- W2398583174 date "2004-09-01" @default.
- W2398583174 modified "2023-09-26" @default.
- W2398583174 title "AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis" @default.
- W2398583174 doi "https://doi.org/10.1016/j.microrel.2004.07.079" @default.
- W2398583174 hasPublicationYear "2004" @default.
- W2398583174 type Work @default.
- W2398583174 sameAs 2398583174 @default.
- W2398583174 citedByCount "4" @default.
- W2398583174 crossrefType "journal-article" @default.
- W2398583174 hasConcept C102951782 @default.
- W2398583174 hasConcept C108225325 @default.
- W2398583174 hasConcept C113196181 @default.
- W2398583174 hasConcept C120665830 @default.
- W2398583174 hasConcept C121332964 @default.
- W2398583174 hasConcept C147080431 @default.
- W2398583174 hasConcept C147789679 @default.
- W2398583174 hasConcept C159985019 @default.
- W2398583174 hasConcept C171250308 @default.
- W2398583174 hasConcept C17525397 @default.
- W2398583174 hasConcept C185592680 @default.
- W2398583174 hasConcept C187921700 @default.
- W2398583174 hasConcept C191952053 @default.
- W2398583174 hasConcept C192562407 @default.
- W2398583174 hasConcept C26771246 @default.
- W2398583174 hasConcept C30066665 @default.
- W2398583174 hasConcept C36628996 @default.
- W2398583174 hasConcept C43617362 @default.
- W2398583174 hasConcept C49040817 @default.
- W2398583174 hasConcept C57863236 @default.
- W2398583174 hasConcept C99752389 @default.
- W2398583174 hasConceptScore W2398583174C102951782 @default.
- W2398583174 hasConceptScore W2398583174C108225325 @default.
- W2398583174 hasConceptScore W2398583174C113196181 @default.
- W2398583174 hasConceptScore W2398583174C120665830 @default.
- W2398583174 hasConceptScore W2398583174C121332964 @default.
- W2398583174 hasConceptScore W2398583174C147080431 @default.
- W2398583174 hasConceptScore W2398583174C147789679 @default.
- W2398583174 hasConceptScore W2398583174C159985019 @default.
- W2398583174 hasConceptScore W2398583174C171250308 @default.
- W2398583174 hasConceptScore W2398583174C17525397 @default.
- W2398583174 hasConceptScore W2398583174C185592680 @default.
- W2398583174 hasConceptScore W2398583174C187921700 @default.
- W2398583174 hasConceptScore W2398583174C191952053 @default.
- W2398583174 hasConceptScore W2398583174C192562407 @default.
- W2398583174 hasConceptScore W2398583174C26771246 @default.
- W2398583174 hasConceptScore W2398583174C30066665 @default.
- W2398583174 hasConceptScore W2398583174C36628996 @default.
- W2398583174 hasConceptScore W2398583174C43617362 @default.
- W2398583174 hasConceptScore W2398583174C49040817 @default.
- W2398583174 hasConceptScore W2398583174C57863236 @default.
- W2398583174 hasConceptScore W2398583174C99752389 @default.
- W2398583174 hasIssue "9-11" @default.
- W2398583174 hasLocation W23985831741 @default.
- W2398583174 hasOpenAccess W2398583174 @default.
- W2398583174 hasPrimaryLocation W23985831741 @default.
- W2398583174 hasRelatedWork W1741299733 @default.
- W2398583174 hasRelatedWork W1969911608 @default.
- W2398583174 hasRelatedWork W2017713470 @default.
- W2398583174 hasRelatedWork W2038204692 @default.
- W2398583174 hasRelatedWork W2073731471 @default.
- W2398583174 hasRelatedWork W2313262854 @default.
- W2398583174 hasRelatedWork W2332616056 @default.
- W2398583174 hasRelatedWork W2575211708 @default.
- W2398583174 hasRelatedWork W2182407504 @default.
- W2398583174 hasRelatedWork W2513522880 @default.
- W2398583174 hasVolume "44" @default.
- W2398583174 isParatext "false" @default.
- W2398583174 isRetracted "false" @default.
- W2398583174 magId "2398583174" @default.
- W2398583174 workType "article" @default.