Matches in SemOpenAlex for { <https://semopenalex.org/work/W2401022016> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2401022016 endingPage "59" @default.
- W2401022016 startingPage "55" @default.
- W2401022016 abstract "Metal-gate Al/TiN/ZrN/ZrO2/p-Si metal-insulator-semiconductor structures were fabricated. Epitaxial crystallization of a high-k ZrO2 thin-film was induced by conventional direct current magnetron sputtering (DCMS) or high-power impulse magnetron sputtering (HIPIMS) to enable the subsequent deposition of a ZrN capping layer on it. The HIPIMS-deposited ZrN samples have more favorable physicochemical and capacitance-voltage characteristics than DCMS- deposited ZrN samples. The insufficient power density and the ionization rate of the sputtered metallic atoms during ZrN thin film deposition may cause the (111) planes of t-ZrO2 to disappear in samples with DCMS-deposited ZrN thin films. The more crystalline texture and higher interface trap density arise from the formation of silicate in the ZrO2 films that is induced by the low pulse duration ratio under the applied target power of 500 W, which corresponds to a high peak power density in the HIPIMS system. HIPIMS samples with a higher pulse duration exhibit greater hysteresis, strongly suggesting that the structural defects, such as oxygen vacancies in ZrO2 films, not only influence the crystallographic texture of ZrO2 films but also degrade the hysteretic characteristics." @default.
- W2401022016 created "2016-06-24" @default.
- W2401022016 creator A5001523154 @default.
- W2401022016 creator A5066359340 @default.
- W2401022016 creator A5077338728 @default.
- W2401022016 date "2016-11-01" @default.
- W2401022016 modified "2023-09-26" @default.
- W2401022016 title "Characteristics of metal-gate metal-insulator-semiconductor capacitor with ZrN capping layer fabricated by high-power impulse magnetron sputtering" @default.
- W2401022016 cites W1976234296 @default.
- W2401022016 cites W1988662285 @default.
- W2401022016 cites W1993030599 @default.
- W2401022016 cites W1999464319 @default.
- W2401022016 cites W2004210996 @default.
- W2401022016 cites W2007290463 @default.
- W2401022016 cites W2022652848 @default.
- W2401022016 cites W2034008853 @default.
- W2401022016 cites W2042587713 @default.
- W2401022016 cites W2050947005 @default.
- W2401022016 cites W2056156233 @default.
- W2401022016 cites W2056696679 @default.
- W2401022016 cites W2057048423 @default.
- W2401022016 cites W2059144383 @default.
- W2401022016 cites W2075264942 @default.
- W2401022016 cites W2097011138 @default.
- W2401022016 cites W2144526177 @default.
- W2401022016 cites W840820150 @default.
- W2401022016 cites W1994286628 @default.
- W2401022016 doi "https://doi.org/10.1016/j.tsf.2016.05.027" @default.
- W2401022016 hasPublicationYear "2016" @default.
- W2401022016 type Work @default.
- W2401022016 sameAs 2401022016 @default.
- W2401022016 citedByCount "2" @default.
- W2401022016 countsByYear W24010220162017 @default.
- W2401022016 countsByYear W24010220162018 @default.
- W2401022016 crossrefType "journal-article" @default.
- W2401022016 hasAuthorship W2401022016A5001523154 @default.
- W2401022016 hasAuthorship W2401022016A5066359340 @default.
- W2401022016 hasAuthorship W2401022016A5077338728 @default.
- W2401022016 hasConcept C113196181 @default.
- W2401022016 hasConcept C123408415 @default.
- W2401022016 hasConcept C171250308 @default.
- W2401022016 hasConcept C185592680 @default.
- W2401022016 hasConcept C19067145 @default.
- W2401022016 hasConcept C192562407 @default.
- W2401022016 hasConcept C22423302 @default.
- W2401022016 hasConcept C43617362 @default.
- W2401022016 hasConcept C49040817 @default.
- W2401022016 hasConcept C61427134 @default.
- W2401022016 hasConcept C97892325 @default.
- W2401022016 hasConceptScore W2401022016C113196181 @default.
- W2401022016 hasConceptScore W2401022016C123408415 @default.
- W2401022016 hasConceptScore W2401022016C171250308 @default.
- W2401022016 hasConceptScore W2401022016C185592680 @default.
- W2401022016 hasConceptScore W2401022016C19067145 @default.
- W2401022016 hasConceptScore W2401022016C192562407 @default.
- W2401022016 hasConceptScore W2401022016C22423302 @default.
- W2401022016 hasConceptScore W2401022016C43617362 @default.
- W2401022016 hasConceptScore W2401022016C49040817 @default.
- W2401022016 hasConceptScore W2401022016C61427134 @default.
- W2401022016 hasConceptScore W2401022016C97892325 @default.
- W2401022016 hasFunder F4320321040 @default.
- W2401022016 hasLocation W24010220161 @default.
- W2401022016 hasOpenAccess W2401022016 @default.
- W2401022016 hasPrimaryLocation W24010220161 @default.
- W2401022016 hasRelatedWork W192053364 @default.
- W2401022016 hasRelatedWork W1968373997 @default.
- W2401022016 hasRelatedWork W2003534256 @default.
- W2401022016 hasRelatedWork W2037840071 @default.
- W2401022016 hasRelatedWork W2183996253 @default.
- W2401022016 hasRelatedWork W2353729944 @default.
- W2401022016 hasRelatedWork W2753312755 @default.
- W2401022016 hasRelatedWork W3209277451 @default.
- W2401022016 hasRelatedWork W1953198208 @default.
- W2401022016 hasRelatedWork W2074340788 @default.
- W2401022016 hasVolume "618" @default.
- W2401022016 isParatext "false" @default.
- W2401022016 isRetracted "false" @default.
- W2401022016 magId "2401022016" @default.
- W2401022016 workType "article" @default.