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- W2403343976 abstract "High power pulsed magnetron sputtering (HPPMS) discharge is a new i-PVD technique. With HPPMS, high plasma densities and highly ionized sputtered materials can be produced. The high power is applied to conventional magnetron cathodes in short pulses (typically 50-150 μs). The magnetron cathode was driven by an experimental pulsed power supply in development by Advanced Energy Industries. The power supply can provide peak power pulses in the megawatt range at a repetition frequency of up to 500 Hz and a pulse width in the range of 50‐150 μs. In this paper, the deposition of thin (< 20 nm) films with HPPMS using carbon cathodes in a 6-inch circular magnetron is described. We present evidence for increased plasma ion production compared to continuous D.C. magnetron sputtering. Carbon film densities up to 2.7 g/cm 3 have been measured. The density is significantly increased compared to films grown by PECVD (2.1 g/cm 3 ) or D.C. sputter deposition (< 2.0 g/cm 3 ). The current‐voltage characteristics of the discharges and thin film characterization are also discussed." @default.
- W2403343976 created "2016-06-24" @default.
- W2403343976 creator A5035493199 @default.
- W2403343976 creator A5075733965 @default.
- W2403343976 date "2003-01-01" @default.
- W2403343976 modified "2023-09-27" @default.
- W2403343976 title "Carbon Thin Film Deposition Using High Power" @default.
- W2403343976 cites W2079580651 @default.
- W2403343976 cites W2498397989 @default.
- W2403343976 hasPublicationYear "2003" @default.
- W2403343976 type Work @default.
- W2403343976 sameAs 2403343976 @default.
- W2403343976 citedByCount "0" @default.
- W2403343976 crossrefType "journal-article" @default.
- W2403343976 hasAuthorship W2403343976A5035493199 @default.
- W2403343976 hasAuthorship W2403343976A5075733965 @default.
- W2403343976 hasConcept C119599485 @default.
- W2403343976 hasConcept C121332964 @default.
- W2403343976 hasConcept C123408415 @default.
- W2403343976 hasConcept C127413603 @default.
- W2403343976 hasConcept C151730666 @default.
- W2403343976 hasConcept C163258240 @default.
- W2403343976 hasConcept C171250308 @default.
- W2403343976 hasConcept C19067145 @default.
- W2403343976 hasConcept C192562407 @default.
- W2403343976 hasConcept C21881925 @default.
- W2403343976 hasConcept C22423302 @default.
- W2403343976 hasConcept C2781083372 @default.
- W2403343976 hasConcept C2816523 @default.
- W2403343976 hasConcept C49040817 @default.
- W2403343976 hasConcept C49110097 @default.
- W2403343976 hasConcept C51576277 @default.
- W2403343976 hasConcept C61427134 @default.
- W2403343976 hasConcept C62520636 @default.
- W2403343976 hasConcept C64297162 @default.
- W2403343976 hasConcept C82706917 @default.
- W2403343976 hasConcept C86803240 @default.
- W2403343976 hasConcept C97892325 @default.
- W2403343976 hasConceptScore W2403343976C119599485 @default.
- W2403343976 hasConceptScore W2403343976C121332964 @default.
- W2403343976 hasConceptScore W2403343976C123408415 @default.
- W2403343976 hasConceptScore W2403343976C127413603 @default.
- W2403343976 hasConceptScore W2403343976C151730666 @default.
- W2403343976 hasConceptScore W2403343976C163258240 @default.
- W2403343976 hasConceptScore W2403343976C171250308 @default.
- W2403343976 hasConceptScore W2403343976C19067145 @default.
- W2403343976 hasConceptScore W2403343976C192562407 @default.
- W2403343976 hasConceptScore W2403343976C21881925 @default.
- W2403343976 hasConceptScore W2403343976C22423302 @default.
- W2403343976 hasConceptScore W2403343976C2781083372 @default.
- W2403343976 hasConceptScore W2403343976C2816523 @default.
- W2403343976 hasConceptScore W2403343976C49040817 @default.
- W2403343976 hasConceptScore W2403343976C49110097 @default.
- W2403343976 hasConceptScore W2403343976C51576277 @default.
- W2403343976 hasConceptScore W2403343976C61427134 @default.
- W2403343976 hasConceptScore W2403343976C62520636 @default.
- W2403343976 hasConceptScore W2403343976C64297162 @default.
- W2403343976 hasConceptScore W2403343976C82706917 @default.
- W2403343976 hasConceptScore W2403343976C86803240 @default.
- W2403343976 hasConceptScore W2403343976C97892325 @default.
- W2403343976 hasLocation W24033439761 @default.
- W2403343976 hasOpenAccess W2403343976 @default.
- W2403343976 hasPrimaryLocation W24033439761 @default.
- W2403343976 hasRelatedWork W1980751218 @default.
- W2403343976 hasRelatedWork W1981348716 @default.
- W2403343976 hasRelatedWork W1985639844 @default.
- W2403343976 hasRelatedWork W1993316505 @default.
- W2403343976 hasRelatedWork W2010829786 @default.
- W2403343976 hasRelatedWork W2025885312 @default.
- W2403343976 hasRelatedWork W2033098126 @default.
- W2403343976 hasRelatedWork W2042486368 @default.
- W2403343976 hasRelatedWork W2044744916 @default.
- W2403343976 hasRelatedWork W2060573780 @default.
- W2403343976 hasRelatedWork W2074591884 @default.
- W2403343976 hasRelatedWork W2182460057 @default.
- W2403343976 hasRelatedWork W2347292131 @default.
- W2403343976 hasRelatedWork W2569733844 @default.
- W2403343976 hasRelatedWork W2737787857 @default.
- W2403343976 hasRelatedWork W2902875940 @default.
- W2403343976 hasRelatedWork W2904548980 @default.
- W2403343976 hasRelatedWork W2963174583 @default.
- W2403343976 hasRelatedWork W5212686 @default.
- W2403343976 hasRelatedWork W1932655064 @default.
- W2403343976 isParatext "false" @default.
- W2403343976 isRetracted "false" @default.
- W2403343976 magId "2403343976" @default.
- W2403343976 workType "article" @default.