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- W2403959918 abstract "Abstract The bonding dynamics of a cone-shaped microbump during ultrasonic bonding are investigated by in situ measurements of the strain generated in a substrate using a piezoresistance strain sensor. The strain sensor is composed of a pair of p- and n-type piezoresistance gauges to extract strain components in the ultrasonic vibration along the plane parallel to the substrate surface and along the direction perpendicular to the surface. Flip-chip bonding is performed at room-temperature. The time evolution of the strain generated in the substrate according to the load-up of pressing force and application of ultrasonic vibration is clearly detected. The softening of the bump metal during the application of ultrasonic vibration is clearly observed. Results of a comparative study between the bonding of a cone-shaped microbump and that of a flat-top microbump suggest mechanical stress concentration near the top end of the cone-shaped microbump, which results in the transformation of the crystal texture of the bump from grains to fine crystallites." @default.
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- W2403959918 date "2016-05-26" @default.
- W2403959918 modified "2023-10-17" @default.
- W2403959918 title "Bonding dynamics of compliant microbump during ultrasonic bonding investigated by using Si strain gauge" @default.
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- W2403959918 doi "https://doi.org/10.7567/jjap.55.06gp22" @default.
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