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- W2404196050 abstract "ABSTRACTA method for obtaining a depth profile of polarity inverted structure in a layered ferroelectric and/or piezoelectric thin film is proposed. It is performed by surface measurement non-destructively using scanning nonlinear dielectric microscopy. We describe estimation principle for the depth profile with some calculation results of measurement signal, which is related to tip radius of the measurement probe and depth of the inverted layer. Also, experimental results in zinc oxide films which have layered polarity-inverted structure fabricated by radio frequency magnetron sputtering and the estimation of the polarity state on the films are shown." @default.
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- W2404196050 date "2016-05-18" @default.
- W2404196050 modified "2023-09-23" @default.
- W2404196050 title "Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy" @default.
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- W2404196050 doi "https://doi.org/10.1080/00150193.2016.1169493" @default.
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