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- W2404253244 startingPage "E29" @default.
- W2404253244 abstract "The semiconductor silicon surface is etched by mixed-acid (HF, HNO3, CH3COOH) solution and gallium in the etched solution is determined by graphite furnace atomic absorption spectrometry using a zirconium impregnated graphite tube. The depth of the silicon layer was ascertained by determination of the silicon content in the etched solution by inductively-coupled plasma atomic emission spectrometry. This method permits determination of gallium up to 1016 atoms in 200 nm sections of silicon slice with a diameter of 2.5 cm." @default.
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- W2404253244 date "1984-01-01" @default.
- W2404253244 modified "2023-10-10" @default.
- W2404253244 title "Determination of gallium depth profiles in semiconductor silicon by chemical etching and graphite furnace atomic absorption spectrometry." @default.
- W2404253244 doi "https://doi.org/10.2116/bunsekikagaku.33.e29" @default.
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