FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2405582742> ?p ?o ?g. }

• W2405582742 abstract "A multi-scale numerical method coupled with the reactor, sheath and trench model is constructed to simulate dry etching of SiO2 in inductively coupled C4F8 plasmas. Firstly, ion and neutral particle densities in the reactor are decided using the CFD-ACE+ commercial software. Then, the ion energy and angular distributions (IEDs and IADs) are obtained in the sheath model with the sheath boundary conditions provided with CFD-ACE+. Finally, the trench profile evolution is simulated in the trench model. What we principally focus on is the effects of the discharge parameters on the etching results. It is found that the discharge parameters, including discharge pressure, radio-frequency (rf) power, gas mixture ratios, bias voltage and frequency, have synergistic effects on IEDs and IADs on the etched material surface, thus further affecting the trench profiles evolution." @default.
• W2405582742 created "2016-06-24" @default.
• W2405582742 creator A5006775843 @default.
• W2405582742 creator A5010243516 @default.
• W2405582742 creator A5020077904 @default.
• W2405582742 creator A5044490453 @default.
• W2405582742 creator A5077113088 @default.
• W2405582742 date "2016-06-01" @default.
• W2405582742 modified "2023-09-26" @default.
• W2405582742 title "A Multi-Scale Study on Silicon-Oxide Etching Processes in C4F8/Ar Plasmas" @default.
• W2405582742 cites W1490338220 @default.
• W2405582742 cites W1555590659 @default.
• W2405582742 cites W1591368507 @default.
• W2405582742 cites W1894003725 @default.
• W2405582742 cites W1966993511 @default.
• W2405582742 cites W1968761733 @default.
• W2405582742 cites W1969852806 @default.
• W2405582742 cites W1973123202 @default.
• W2405582742 cites W1982688877 @default.
• W2405582742 cites W1990939766 @default.
• W2405582742 cites W1993615297 @default.
• W2405582742 cites W1996842175 @default.
• W2405582742 cites W2009073215 @default.
• W2405582742 cites W2013712421 @default.
• W2405582742 cites W2018247079 @default.
• W2405582742 cites W2023728789 @default.
• W2405582742 cites W2032002319 @default.
• W2405582742 cites W2043692155 @default.
• W2405582742 cites W2048131010 @default.
• W2405582742 cites W2052612681 @default.
• W2405582742 cites W2056889600 @default.
• W2405582742 cites W2069198780 @default.
• W2405582742 cites W2070815041 @default.
• W2405582742 cites W2073886832 @default.
• W2405582742 cites W2083646779 @default.
• W2405582742 cites W2084884249 @default.
• W2405582742 cites W2091569782 @default.
• W2405582742 cites W2117463812 @default.
• W2405582742 doi "https://doi.org/10.1088/1009-0630/18/6/14" @default.
• W2405582742 hasPublicationYear "2016" @default.
• W2405582742 type Work @default.
• W2405582742 sameAs 2405582742 @default.
• W2405582742 citedByCount "2" @default.
• W2405582742 countsByYear W24055827422016 @default.
• W2405582742 countsByYear W24055827422017 @default.
• W2405582742 crossrefType "journal-article" @default.
• W2405582742 hasAuthorship W2405582742A5006775843 @default.
• W2405582742 hasAuthorship W2405582742A5010243516 @default.
• W2405582742 hasAuthorship W2405582742A5020077904 @default.
• W2405582742 hasAuthorship W2405582742A5044490453 @default.
• W2405582742 hasAuthorship W2405582742A5077113088 @default.
• W2405582742 hasConcept C100460472 @default.
• W2405582742 hasConcept C113196181 @default.
• W2405582742 hasConcept C116915560 @default.
• W2405582742 hasConcept C121332964 @default.
• W2405582742 hasConcept C127413603 @default.
• W2405582742 hasConcept C155310634 @default.
• W2405582742 hasConcept C159985019 @default.
• W2405582742 hasConcept C184779094 @default.
• W2405582742 hasConcept C185544564 @default.
• W2405582742 hasConcept C185592680 @default.
• W2405582742 hasConcept C191897082 @default.
• W2405582742 hasConcept C192562407 @default.
• W2405582742 hasConcept C2779227376 @default.
• W2405582742 hasConcept C2779851234 @default.
• W2405582742 hasConcept C30475298 @default.
• W2405582742 hasConcept C43617362 @default.
• W2405582742 hasConcept C49040817 @default.
• W2405582742 hasConcept C544956773 @default.
• W2405582742 hasConcept C57879066 @default.
• W2405582742 hasConcept C82706917 @default.
• W2405582742 hasConceptScore W2405582742C100460472 @default.
• W2405582742 hasConceptScore W2405582742C113196181 @default.
• W2405582742 hasConceptScore W2405582742C116915560 @default.
• W2405582742 hasConceptScore W2405582742C121332964 @default.
• W2405582742 hasConceptScore W2405582742C127413603 @default.
• W2405582742 hasConceptScore W2405582742C155310634 @default.
• W2405582742 hasConceptScore W2405582742C159985019 @default.
• W2405582742 hasConceptScore W2405582742C184779094 @default.
• W2405582742 hasConceptScore W2405582742C185544564 @default.
• W2405582742 hasConceptScore W2405582742C185592680 @default.
• W2405582742 hasConceptScore W2405582742C191897082 @default.
• W2405582742 hasConceptScore W2405582742C192562407 @default.
• W2405582742 hasConceptScore W2405582742C2779227376 @default.
• W2405582742 hasConceptScore W2405582742C2779851234 @default.
• W2405582742 hasConceptScore W2405582742C30475298 @default.
• W2405582742 hasConceptScore W2405582742C43617362 @default.
• W2405582742 hasConceptScore W2405582742C49040817 @default.
• W2405582742 hasConceptScore W2405582742C544956773 @default.
• W2405582742 hasConceptScore W2405582742C57879066 @default.
• W2405582742 hasConceptScore W2405582742C82706917 @default.
• W2405582742 hasLocation W24055827421 @default.
• W2405582742 hasOpenAccess W2405582742 @default.
• W2405582742 hasPrimaryLocation W24055827421 @default.
• W2405582742 hasRelatedWork W1491463124 @default.
• W2405582742 hasRelatedWork W1520208499 @default.
• W2405582742 hasRelatedWork W1930649184 @default.
• W2405582742 hasRelatedWork W1969577990 @default.
• W2405582742 hasRelatedWork W1982348419 @default.
• W2405582742 hasRelatedWork W1993590892 @default.

• next