Matches in SemOpenAlex for { <https://semopenalex.org/work/W2405689318> ?p ?o ?g. }
- W2405689318 endingPage "1118" @default.
- W2405689318 startingPage "1112" @default.
- W2405689318 abstract "This article reports on flexible hard Al-Si-N films prepared by reactive magnetron sputtering. The structure and mechanical properties of Al-Si-N films were controlled by the content of Si in the film, partial pressure of nitrogen pN2 used in sputtering and the power delivered to the magnetron. The Al-Si-N films with a low (≤ 10 at.%) Si content and with a high (≥ 20 at.%) Si content were prepared. Correlations between the structure, microstructure, mechanical properties and their thermal stability of the Al-Si-N films are analyzed in detail. Thermal stability of Al-Si-N films was assessed by thermal annealing in air and water vapor up to annealing temperature Ta = 1200 °C. It is shown that (1) the increase of Si content in the Al-Si-N film leads to the change of its crystalline structure from polycrystalline to X-ray amorphous and (2) the flexible hard Al-Si-N films with high (i) hardness H ≈ 20 GPa, (ii) ratio H/E⁎ ≥ 0.1, and (iii) elastic recovery We ≥ 60% exhibit enhanced resistance to cracking and (3) the thermal stability of Al-Si-N films with a high (≥ 20 at.%) Si content achieves up to Ta ≈ 1200 °C in air and up to Ta ≈ 800 °C in water vapor; here the effective Young's modulus E⁎ = E / (1 − ν2), E is the Young's modulus and ν is the Poisson's ratio. Conditions under which the flexible hard Al-Si-N films with enhanced resistance to cracking and high thermal stability can be prepared are described in detail." @default.
- W2405689318 created "2016-06-24" @default.
- W2405689318 creator A5010110655 @default.
- W2405689318 creator A5021727502 @default.
- W2405689318 creator A5024753761 @default.
- W2405689318 creator A5027046437 @default.
- W2405689318 creator A5031298816 @default.
- W2405689318 creator A5041712528 @default.
- W2405689318 creator A5043700148 @default.
- W2405689318 creator A5067797189 @default.
- W2405689318 creator A5078947507 @default.
- W2405689318 date "2016-12-01" @default.
- W2405689318 modified "2023-10-11" @default.
- W2405689318 title "Flexible hard Al-Si-N films for high temperature operation" @default.
- W2405689318 cites W1576114465 @default.
- W2405689318 cites W1966679434 @default.
- W2405689318 cites W1971749241 @default.
- W2405689318 cites W1972823239 @default.
- W2405689318 cites W1980085999 @default.
- W2405689318 cites W1991897258 @default.
- W2405689318 cites W2000015515 @default.
- W2405689318 cites W2007848992 @default.
- W2405689318 cites W2026601168 @default.
- W2405689318 cites W2028096058 @default.
- W2405689318 cites W2028208869 @default.
- W2405689318 cites W2028704378 @default.
- W2405689318 cites W2036827905 @default.
- W2405689318 cites W2042484173 @default.
- W2405689318 cites W2045361264 @default.
- W2405689318 cites W2047615267 @default.
- W2405689318 cites W2047800787 @default.
- W2405689318 cites W2050802638 @default.
- W2405689318 cites W2050931004 @default.
- W2405689318 cites W2053083288 @default.
- W2405689318 cites W2056163846 @default.
- W2405689318 cites W2060555202 @default.
- W2405689318 cites W2066376342 @default.
- W2405689318 cites W2066874036 @default.
- W2405689318 cites W2075499302 @default.
- W2405689318 cites W2081096636 @default.
- W2405689318 cites W2084478069 @default.
- W2405689318 cites W2086542027 @default.
- W2405689318 cites W2095787778 @default.
- W2405689318 cites W2141773741 @default.
- W2405689318 cites W2143822570 @default.
- W2405689318 cites W2157599717 @default.
- W2405689318 cites W2209342375 @default.
- W2405689318 cites W2397899945 @default.
- W2405689318 cites W2953193140 @default.
- W2405689318 cites W4211149818 @default.
- W2405689318 doi "https://doi.org/10.1016/j.surfcoat.2016.05.054" @default.
- W2405689318 hasPublicationYear "2016" @default.
- W2405689318 type Work @default.
- W2405689318 sameAs 2405689318 @default.
- W2405689318 citedByCount "34" @default.
- W2405689318 countsByYear W24056893182016 @default.
- W2405689318 countsByYear W24056893182017 @default.
- W2405689318 countsByYear W24056893182018 @default.
- W2405689318 countsByYear W24056893182019 @default.
- W2405689318 countsByYear W24056893182020 @default.
- W2405689318 countsByYear W24056893182021 @default.
- W2405689318 countsByYear W24056893182022 @default.
- W2405689318 countsByYear W24056893182023 @default.
- W2405689318 crossrefType "journal-article" @default.
- W2405689318 hasAuthorship W2405689318A5010110655 @default.
- W2405689318 hasAuthorship W2405689318A5021727502 @default.
- W2405689318 hasAuthorship W2405689318A5024753761 @default.
- W2405689318 hasAuthorship W2405689318A5027046437 @default.
- W2405689318 hasAuthorship W2405689318A5031298816 @default.
- W2405689318 hasAuthorship W2405689318A5041712528 @default.
- W2405689318 hasAuthorship W2405689318A5043700148 @default.
- W2405689318 hasAuthorship W2405689318A5067797189 @default.
- W2405689318 hasAuthorship W2405689318A5078947507 @default.
- W2405689318 hasConcept C113196181 @default.
- W2405689318 hasConcept C127413603 @default.
- W2405689318 hasConcept C137637335 @default.
- W2405689318 hasConcept C159985019 @default.
- W2405689318 hasConcept C171250308 @default.
- W2405689318 hasConcept C185592680 @default.
- W2405689318 hasConcept C19067145 @default.
- W2405689318 hasConcept C191897082 @default.
- W2405689318 hasConcept C192562407 @default.
- W2405689318 hasConcept C22423302 @default.
- W2405689318 hasConcept C2777855556 @default.
- W2405689318 hasConcept C42360764 @default.
- W2405689318 hasConcept C43486711 @default.
- W2405689318 hasConcept C43617362 @default.
- W2405689318 hasConcept C56052488 @default.
- W2405689318 hasConcept C59061564 @default.
- W2405689318 hasConcept C61427134 @default.
- W2405689318 hasConcept C8010536 @default.
- W2405689318 hasConcept C87976508 @default.
- W2405689318 hasConceptScore W2405689318C113196181 @default.
- W2405689318 hasConceptScore W2405689318C127413603 @default.
- W2405689318 hasConceptScore W2405689318C137637335 @default.
- W2405689318 hasConceptScore W2405689318C159985019 @default.
- W2405689318 hasConceptScore W2405689318C171250308 @default.
- W2405689318 hasConceptScore W2405689318C185592680 @default.