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• W2406357718 abstract "In this research, we investigated the growth mechanism of cobalt-doped titanium dioxide (Co:TiO2) films. Thi Co:TiO2 thin films were grown on the n-type silicon substrate. The films were grown by metal organic chemical vapor deposition method. The growth temperature was varied of 325°C – 450°C. The films were characterized by SEM. Using Arheniu's equation, it is known that the activation energy value of film growth is positive in the range of temperature of 325°C – 400°C and negative in the range of temperature of 400°C – 450°C. These results show that the decomposition rate in the range of temperature of 325°C – 400°C is due to diffusion phase of precursor gas. On the other hand, the decomposition rate decreased in the range of temperature of 400°C – 450°C because the precursor gas decreased, and the surface chemical reaction was high." @default.
• W2406357718 created "2016-06-24" @default.
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• W2406357718 date "2016-04-01" @default.
• W2406357718 modified "2023-10-16" @default.
• W2406357718 title "Growth mechanism of Co:TiO2thin film deposited by metal organic chemical vapor deposition technique" @default.
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• W2406357718 doi "https://doi.org/10.1088/1757-899x/128/1/012046" @default.
• W2406357718 hasPublicationYear "2016" @default.
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