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• W2407390147 abstract "A new planar-type microsensor, which had a platinum heater and a sensing layer on the same plane was fabricated on silicon substrate with stress-relieved PSG(phosphosilicate glass)/Si₃N₄(8(10nm/150nm) diaphragm. The proposed planar-type microsensor could be fabricated by simple silicon process using only 3 masks for photolithography process compared with 5 or 6 masks of the typical micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of the fabricated microheater. Although there are some discrepancy between the simulation result and the result from the fabricated microheater, the thermal simulation by FEM was proved to be an useful method to evaluate the thermal properties of microheater. The sensing characteristics of the fabricated microsensor with the planar-type heater were investigated also." @default.
• W2407390147 created "2016-06-24" @default.
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• W2407390147 date "1997-01-01" @default.
• W2407390147 modified "2023-09-27" @default.
• W2407390147 title "Fabrication of low power micro - heater for micro - gas sensor 2 . Characteristics of micro - gas sensor" @default.
• W2407390147 hasPublicationYear "1997" @default.
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