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- W2409119100 abstract "Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated. A combination of Rayleigh＇s method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters. Three micromachined lateral resonant resonators with different beam widths were fabricated. Their resonant frequencies were experimentally measured to be 64.5,147.2, and 255.5kHz, respectively, which are in good agreement with the simulated resonant frequency. It is shown that an improved frequency performance could be obtained on the poly 3C-SiC based device structural material systems with high Young＇s modulus." @default.
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- W2409119100 date "2008-08-02" @default.
- W2409119100 modified "2023-09-28" @default.
- W2409119100 title "Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures" @default.
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