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- W2409292628 abstract "Today's Micro-Electromechanical Systems (MEMS)accelerometers suffer from input offsets that drift withtemperature and time. These devices are calibrated once afterfabrication in order to cancel their offset. In order to cancel theoffset drift over temperature, the temperature is swept during thepost-fabrication calibration and the offset is recorded as afunction of temperature. However, the residual offset drifts overthe life-time of the device, and cannot be cancelled by a one-timefactory calibration. With the continuously increasing precisionrequirements of accelerometers, this offset drift is emerging as anissue. This dissertation presents a new approach that dynamicallymeasures and cancels a major part of the offset drift that is dueto change in parasitic capacitance of the bondwires in asystem-in-package-type MEMS accelerometer. This approach is basedon modulation of the spring constant of the sensor element byapplying a modulating electrostatic force. A prototype interface ICwas fabricated in a 0.18-μm 3-V CMOS technology, and was packagedand tested with a MEMS sensor element. The CMOS readout dissipates3.1 mW, and has a noise-floor of 220 μg/√Hz. The bandwidth of theinterface is 1 kHz with a usable bandwidth of 200 Hz. Thefull-scale range is 9.14 g. The proposed scheme reduces thebondwire offset of a prototype by a factor of 112(41dB)." @default.
- W2409292628 created "2016-06-24" @default.
- W2409292628 creator A5083361561 @default.
- W2409292628 date "2012-01-01" @default.
- W2409292628 modified "2023-09-23" @default.
- W2409292628 title "Dynamic offset cancellation for MEMS accelerometers" @default.
- W2409292628 hasPublicationYear "2012" @default.
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