FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2410009447> ?p ?o ?g. }

• W2410009447 endingPage "P303" @default.
• W2410009447 startingPage "P299" @default.
• W2410009447 abstract "N type metal gate TiAlC film was grown by thermal atomic layer deposition (ALD) technique using titanium tetrachloride (TiCl4) and triethylaluminum (TEA) as precursors for the first time. The physical characteristics of the TiAlC film such as chemical composition, growth rate and crystal morphology were estimated by X-ray photoemission spectroscopy, X-ray reflectivity and X-ray diffraction, respectively. The electrical characteristics of the TiAlC films were investigated by using metal-oxide-semiconductor (MOS) capacitor structure. The effective workfunction can be tunable from 4.46 eV to 4.24 eV by adjusting the growth temperature and the film thickness. The effective workfunction of 4.24 eV is close to the Si conduction band edge. These results show that the TiAlC film is a promising gate metal candidate for the application in FinFET device of 22 nm technology node and beyond." @default.
• W2410009447 created "2016-06-24" @default.
• W2410009447 creator A5031044167 @default.
• W2410009447 creator A5043675539 @default.
• W2410009447 creator A5055170617 @default.
• W2410009447 creator A5057844513 @default.
• W2410009447 creator A5059055214 @default.
• W2410009447 creator A5061396145 @default.
• W2410009447 creator A5070197305 @default.
• W2410009447 creator A5082789515 @default.
• W2410009447 date "2016-01-01" @default.
• W2410009447 modified "2023-10-12" @default.
• W2410009447 title "Investigation of N Type Metal TiAlC by Thermal Atomic Layer Deposition Using TiCl₄and TEA as Precursors" @default.
• W2410009447 cites W1207383441 @default.
• W2410009447 cites W1970925196 @default.
• W2410009447 cites W1973221791 @default.
• W2410009447 cites W1973439783 @default.
• W2410009447 cites W1979239158 @default.
• W2410009447 cites W1989170000 @default.
• W2410009447 cites W1995191254 @default.
• W2410009447 cites W1995854703 @default.
• W2410009447 cites W2008922286 @default.
• W2410009447 cites W2015271470 @default.
• W2410009447 cites W2027755466 @default.
• W2410009447 cites W2034017932 @default.
• W2410009447 cites W2158932701 @default.
• W2410009447 cites W2161169132 @default.
• W2410009447 cites W2167891685 @default.
• W2410009447 cites W2224456893 @default.
• W2410009447 cites W2329996056 @default.
• W2410009447 doi "https://doi.org/10.1149/2.0291605jss" @default.
• W2410009447 hasPublicationYear "2016" @default.
• W2410009447 type Work @default.
• W2410009447 sameAs 2410009447 @default.
• W2410009447 citedByCount "24" @default.
• W2410009447 countsByYear W24100094472016 @default.
• W2410009447 countsByYear W24100094472017 @default.
• W2410009447 countsByYear W24100094472018 @default.
• W2410009447 countsByYear W24100094472019 @default.
• W2410009447 countsByYear W24100094472020 @default.
• W2410009447 countsByYear W24100094472021 @default.
• W2410009447 countsByYear W24100094472022 @default.
• W2410009447 countsByYear W24100094472023 @default.
• W2410009447 crossrefType "journal-article" @default.
• W2410009447 hasAuthorship W2410009447A5031044167 @default.
• W2410009447 hasAuthorship W2410009447A5043675539 @default.
• W2410009447 hasAuthorship W2410009447A5055170617 @default.
• W2410009447 hasAuthorship W2410009447A5057844513 @default.
• W2410009447 hasAuthorship W2410009447A5059055214 @default.
• W2410009447 hasAuthorship W2410009447A5061396145 @default.
• W2410009447 hasAuthorship W2410009447A5070197305 @default.
• W2410009447 hasAuthorship W2410009447A5082789515 @default.
• W2410009447 hasConcept C113196181 @default.
• W2410009447 hasConcept C121332964 @default.
• W2410009447 hasConcept C151730666 @default.
• W2410009447 hasConcept C165801399 @default.
• W2410009447 hasConcept C171250308 @default.
• W2410009447 hasConcept C172385210 @default.
• W2410009447 hasConcept C185592680 @default.
• W2410009447 hasConcept C191897082 @default.
• W2410009447 hasConcept C192562407 @default.
• W2410009447 hasConcept C2361726 @default.
• W2410009447 hasConcept C2777510880 @default.
• W2410009447 hasConcept C2779227376 @default.
• W2410009447 hasConcept C2779851234 @default.
• W2410009447 hasConcept C2816523 @default.
• W2410009447 hasConcept C43617362 @default.
• W2410009447 hasConcept C49040817 @default.
• W2410009447 hasConcept C506065880 @default.
• W2410009447 hasConcept C51140833 @default.
• W2410009447 hasConcept C544153396 @default.
• W2410009447 hasConcept C62520636 @default.
• W2410009447 hasConcept C64297162 @default.
• W2410009447 hasConcept C69544855 @default.
• W2410009447 hasConcept C86803240 @default.
• W2410009447 hasConceptScore W2410009447C113196181 @default.
• W2410009447 hasConceptScore W2410009447C121332964 @default.
• W2410009447 hasConceptScore W2410009447C151730666 @default.
• W2410009447 hasConceptScore W2410009447C165801399 @default.
• W2410009447 hasConceptScore W2410009447C171250308 @default.
• W2410009447 hasConceptScore W2410009447C172385210 @default.
• W2410009447 hasConceptScore W2410009447C185592680 @default.
• W2410009447 hasConceptScore W2410009447C191897082 @default.
• W2410009447 hasConceptScore W2410009447C192562407 @default.
• W2410009447 hasConceptScore W2410009447C2361726 @default.
• W2410009447 hasConceptScore W2410009447C2777510880 @default.
• W2410009447 hasConceptScore W2410009447C2779227376 @default.
• W2410009447 hasConceptScore W2410009447C2779851234 @default.
• W2410009447 hasConceptScore W2410009447C2816523 @default.
• W2410009447 hasConceptScore W2410009447C43617362 @default.
• W2410009447 hasConceptScore W2410009447C49040817 @default.
• W2410009447 hasConceptScore W2410009447C506065880 @default.
• W2410009447 hasConceptScore W2410009447C51140833 @default.
• W2410009447 hasConceptScore W2410009447C544153396 @default.
• W2410009447 hasConceptScore W2410009447C62520636 @default.
• W2410009447 hasConceptScore W2410009447C64297162 @default.
• W2410009447 hasConceptScore W2410009447C69544855 @default.
• W2410009447 hasConceptScore W2410009447C86803240 @default.

• next