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• W2415704920 startingPage "4125" @default.
• W2415704920 abstract "This paper describes a strategy that uses template-directed self-assembly of micrometer-scale microspheres to fabricate arrays of microlenses for projection photolithography of periodic, quasiperiodic, and aperiodic infrared metasurfaces. This method of “template-encoded microlens projection lithography” (TEMPL) enables rapid prototyping of planar, multiscale patterns of similarly shaped structures with critical dimensions down to ∼400 nm. Each of these structures is defined by local projection lithography with a single microsphere acting as a lens. This paper explores the use of TEMPL for the fabrication of a broad range of two-dimensional lattices with varying types of nonperiodic spatial distribution. The matching optical spectra of the fabricated and simulated metasurfaces confirm that TEMPL can produce structures that conform to expected optical behavior." @default.
• W2415704920 created "2016-06-24" @default.
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• W2415704920 date "2016-06-03" @default.
• W2415704920 modified "2023-10-15" @default.
• W2415704920 title "Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography" @default.
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• W2415704920 doi "https://doi.org/10.1021/acs.nanolett.6b00952" @default.
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• W2415704920 hasPublicationYear "2016" @default.
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