FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W242028386> ?p ?o ?g. }

• W242028386 abstract "Many MEMS devices utilize thin metallic films as mechanical structures. The elastic and plastic properties of these thin films (thickness < 1μm) are significantly different from those of the bulk material. At these scales the volume fraction of material defects such as: grain boundaries, dislocations and interstitials become quite significant and become a chief contributor the physical and mechanical material properties of the thin films. Aluminum (Al), Copper (Cu), Nickel (Ni) and Gold (Au) are popular thin film materials used in MEMS/NEMS. Various studies have been conducted in recent years to study the mechanical properties of freestanding thin films in situ in TEM to study their failure mechanisms. Some of these studies utilize MEMS devices as actuators. These actuators are often co-fabricated with the specimen being tested therefore limiting the type of specimen that could be tested. Also these MEMS actuators are almost never traceably calibrated and their response is calculated. This thesis describes the design and fabrication process of a MEMS actuator for materials testing in-situ in TEM. The actuator is fabricated independent of the specimen. A setup was designed to calibrate these devices with a method that can be traced back to NIST standards. It has been shown that the calibrated response of these MEMS actuators is different from its calculated response and the use of un-calibrated devices for materials testing can lead to misleading results." @default.
• W242028386 created "2016-06-24" @default.
• W242028386 creator A5053103871 @default.
• W242028386 date "2009-01-01" @default.
• W242028386 modified "2023-09-23" @default.
• W242028386 title "Design fabrication and calibration of MEMS actuators for in-situ materials testing" @default.
• W242028386 cites W1750790680 @default.
• W242028386 cites W1973854382 @default.
• W242028386 cites W1975812131 @default.
• W242028386 cites W1986828225 @default.
• W242028386 cites W1995480097 @default.
• W242028386 cites W2001440236 @default.
• W242028386 cites W2006119309 @default.
• W242028386 cites W2009724607 @default.
• W242028386 cites W2018046396 @default.
• W242028386 cites W2030552305 @default.
• W242028386 cites W2033591834 @default.
• W242028386 cites W2038667420 @default.
• W242028386 cites W2043671020 @default.
• W242028386 cites W2067769437 @default.
• W242028386 cites W2069401367 @default.
• W242028386 cites W2078528767 @default.
• W242028386 cites W2085457709 @default.
• W242028386 cites W2085804738 @default.
• W242028386 cites W2094024012 @default.
• W242028386 cites W2100916163 @default.
• W242028386 cites W2102268179 @default.
• W242028386 cites W2111062180 @default.
• W242028386 cites W2133959334 @default.
• W242028386 cites W2136664010 @default.
• W242028386 cites W2137178805 @default.
• W242028386 cites W2142809565 @default.
• W242028386 cites W2144876431 @default.
• W242028386 cites W2150340249 @default.
• W242028386 cites W2165956672 @default.
• W242028386 cites W1517255195 @default.
• W242028386 cites W1558285898 @default.
• W242028386 cites W2934185470 @default.
• W242028386 hasPublicationYear "2009" @default.
• W242028386 type Work @default.
• W242028386 sameAs 242028386 @default.
• W242028386 citedByCount "5" @default.
• W242028386 countsByYear W2420283862012 @default.
• W242028386 countsByYear W2420283862018 @default.
• W242028386 crossrefType "journal-article" @default.
• W242028386 hasAuthorship W242028386A5053103871 @default.
• W242028386 hasConcept C105795698 @default.
• W242028386 hasConcept C119599485 @default.
• W242028386 hasConcept C127413603 @default.
• W242028386 hasConcept C136525101 @default.
• W242028386 hasConcept C142724271 @default.
• W242028386 hasConcept C15083742 @default.
• W242028386 hasConcept C155672457 @default.
• W242028386 hasConcept C159985019 @default.
• W242028386 hasConcept C165838908 @default.
• W242028386 hasConcept C171250308 @default.
• W242028386 hasConcept C172707124 @default.
• W242028386 hasConcept C173409883 @default.
• W242028386 hasConcept C19067145 @default.
• W242028386 hasConcept C192562407 @default.
• W242028386 hasConcept C204787440 @default.
• W242028386 hasConcept C33923547 @default.
• W242028386 hasConcept C37977207 @default.
• W242028386 hasConcept C49040817 @default.
• W242028386 hasConcept C71924100 @default.
• W242028386 hasConceptScore W242028386C105795698 @default.
• W242028386 hasConceptScore W242028386C119599485 @default.
• W242028386 hasConceptScore W242028386C127413603 @default.
• W242028386 hasConceptScore W242028386C136525101 @default.
• W242028386 hasConceptScore W242028386C142724271 @default.
• W242028386 hasConceptScore W242028386C15083742 @default.
• W242028386 hasConceptScore W242028386C155672457 @default.
• W242028386 hasConceptScore W242028386C159985019 @default.
• W242028386 hasConceptScore W242028386C165838908 @default.
• W242028386 hasConceptScore W242028386C171250308 @default.
• W242028386 hasConceptScore W242028386C172707124 @default.
• W242028386 hasConceptScore W242028386C173409883 @default.
• W242028386 hasConceptScore W242028386C19067145 @default.
• W242028386 hasConceptScore W242028386C192562407 @default.
• W242028386 hasConceptScore W242028386C204787440 @default.
• W242028386 hasConceptScore W242028386C33923547 @default.
• W242028386 hasConceptScore W242028386C37977207 @default.
• W242028386 hasConceptScore W242028386C49040817 @default.
• W242028386 hasConceptScore W242028386C71924100 @default.
• W242028386 hasLocation W2420283861 @default.
• W242028386 hasOpenAccess W242028386 @default.
• W242028386 hasPrimaryLocation W2420283861 @default.
• W242028386 hasRelatedWork W1852323362 @default.
• W242028386 hasRelatedWork W1974689153 @default.
• W242028386 hasRelatedWork W2003961957 @default.
• W242028386 hasRelatedWork W2008642846 @default.
• W242028386 hasRelatedWork W2023611549 @default.
• W242028386 hasRelatedWork W2079002928 @default.
• W242028386 hasRelatedWork W2088151919 @default.
• W242028386 hasRelatedWork W2158160292 @default.
• W242028386 hasRelatedWork W2172210553 @default.
• W242028386 hasRelatedWork W233240900 @default.
• W242028386 hasRelatedWork W2490373401 @default.
• W242028386 hasRelatedWork W2494300279 @default.
• W242028386 hasRelatedWork W2790443760 @default.

• next