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- W2433451718 abstract "For almost three decades, technologies for integrated sensors and actuators have been developed in a number of institutions in the world. Yet, the effective utilization of microsystems in many promising applications is still hindered by the lack of micromachined parts with acceptable price/performance levels. The question remains: can micromachining deliver the results required for microsystems to get from research prototypes to an industrial market. This paper presents the solution proposed by MPC Services based on the use of existing manufacturing lines for microelectronics with an additional post-processing to release the specific structures of the microsystems. A general presentation of MPC services available in various countries is given where the CMP French service is used to exemplify a few basic principles that should govern the management of such services." @default.
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- W2433451718 date "1997-05-01" @default.
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- W2433451718 title "Access to microsystem technology: the MPC services solution" @default.
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- W2433451718 doi "https://doi.org/10.1016/s0026-2692(96)00066-3" @default.
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