FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2433804878> ?p ?o ?g. }

• W2433804878 endingPage "465201" @default.
• W2433804878 startingPage "465201" @default.
• W2433804878 abstract "This is the first report characterizing local anodic oxidation (LAO) lithography performed using conductive monolithic polycrystalline diamond (MD) and conductive polycrystalline diamond-coated (DC) tips and comparing it to the diamond-like carbon-coated and metal-coated silicon tips. The range and the rate of increase in the lithographic linewidth and height with tip bias (dw/dV and dh/dV) differed based on the tip material. The DC tips resulted in wider and taller lines and a higher dw/dV and dh/dV compared to metal-coated tips with a similar force constant (k(Avg)). The metal-coated and the DC tips with comparable k(Avg) showed comparable threshold voltages, whereas the MD tips with similar k(Avg) showed a higher threshold voltage. The MD tips exhibited less than half the height and nearly half the dw/dV and dh/dV obtained with the metal-coated tips with similar k Avg, thus also resulting in a smaller width at -10 V. The linewidths were found to be proportional to the inverse of the log of write speed(v) for all the tips; however, the proportionality constant varied with tip material; the DC tips had larger values, and the MD and the metal-coated tips had comparable values. When varying the speed, the height was found to be a sigmoidal function of width, with the MD probes achieving lower height compared to the metal-coated and the DC tips with comparable k(Avg). This study expands the application of monolithic conductive polycrystalline diamond (PCD) probes with outstanding wear resistance to fine LAO lithography." @default.
• W2433804878 created "2016-06-24" @default.
• W2433804878 creator A5081791814 @default.
• W2433804878 creator A5083701944 @default.
• W2433804878 date "2015-10-26" @default.
• W2433804878 modified "2023-10-17" @default.
• W2433804878 title "Conductive polycrystalline diamond probes for local anodic oxidation lithography" @default.
• W2433804878 cites W1970588492 @default.
• W2433804878 cites W1971471661 @default.
• W2433804878 cites W1973258447 @default.
• W2433804878 cites W1979740902 @default.
• W2433804878 cites W2004061591 @default.
• W2433804878 cites W2009458523 @default.
• W2433804878 cites W2010132176 @default.
• W2433804878 cites W2017646543 @default.
• W2433804878 cites W2023679097 @default.
• W2433804878 cites W2024196382 @default.
• W2433804878 cites W2025225250 @default.
• W2433804878 cites W2030602832 @default.
• W2433804878 cites W2037012265 @default.
• W2433804878 cites W2045870564 @default.
• W2433804878 cites W2046034105 @default.
• W2433804878 cites W2046451465 @default.
• W2433804878 cites W2047697697 @default.
• W2433804878 cites W2048036398 @default.
• W2433804878 cites W2048784768 @default.
• W2433804878 cites W2058323408 @default.
• W2433804878 cites W2066908181 @default.
• W2433804878 cites W2067445147 @default.
• W2433804878 cites W2070983065 @default.
• W2433804878 cites W2084035803 @default.
• W2433804878 cites W2092265968 @default.
• W2433804878 cites W2093911792 @default.
• W2433804878 cites W2094656325 @default.
• W2433804878 cites W2114108763 @default.
• W2433804878 cites W2138902083 @default.
• W2433804878 cites W2140925206 @default.
• W2433804878 cites W2143389377 @default.
• W2433804878 cites W2143601333 @default.
• W2433804878 cites W2147300494 @default.
• W2433804878 cites W2150297986 @default.
• W2433804878 cites W2157424496 @default.
• W2433804878 cites W2158078966 @default.
• W2433804878 cites W2165417205 @default.
• W2433804878 cites W4249623350 @default.
• W2433804878 doi "https://doi.org/10.1088/0957-4484/26/46/465201" @default.
• W2433804878 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/26501841" @default.
• W2433804878 hasPublicationYear "2015" @default.
• W2433804878 type Work @default.
• W2433804878 sameAs 2433804878 @default.
• W2433804878 citedByCount "7" @default.
• W2433804878 countsByYear W24338048782017 @default.
• W2433804878 countsByYear W24338048782019 @default.
• W2433804878 crossrefType "journal-article" @default.
• W2433804878 hasAuthorship W2433804878A5081791814 @default.
• W2433804878 hasAuthorship W2433804878A5083701944 @default.
• W2433804878 hasConcept C113196181 @default.
• W2433804878 hasConcept C137637335 @default.
• W2433804878 hasConcept C159985019 @default.
• W2433804878 hasConcept C185592680 @default.
• W2433804878 hasConcept C191897082 @default.
• W2433804878 hasConcept C192562407 @default.
• W2433804878 hasConcept C202374169 @default.
• W2433804878 hasConcept C204223013 @default.
• W2433804878 hasConcept C2776921476 @default.
• W2433804878 hasConcept C43617362 @default.
• W2433804878 hasConcept C49040817 @default.
• W2433804878 hasConcept C544153396 @default.
• W2433804878 hasConceptScore W2433804878C113196181 @default.
• W2433804878 hasConceptScore W2433804878C137637335 @default.
• W2433804878 hasConceptScore W2433804878C159985019 @default.
• W2433804878 hasConceptScore W2433804878C185592680 @default.
• W2433804878 hasConceptScore W2433804878C191897082 @default.
• W2433804878 hasConceptScore W2433804878C192562407 @default.
• W2433804878 hasConceptScore W2433804878C202374169 @default.
• W2433804878 hasConceptScore W2433804878C204223013 @default.
• W2433804878 hasConceptScore W2433804878C2776921476 @default.
• W2433804878 hasConceptScore W2433804878C43617362 @default.
• W2433804878 hasConceptScore W2433804878C49040817 @default.
• W2433804878 hasConceptScore W2433804878C544153396 @default.
• W2433804878 hasFunder F4320309392 @default.
• W2433804878 hasIssue "46" @default.
• W2433804878 hasLocation W24338048781 @default.
• W2433804878 hasLocation W24338048782 @default.
• W2433804878 hasOpenAccess W2433804878 @default.
• W2433804878 hasPrimaryLocation W24338048781 @default.
• W2433804878 hasRelatedWork W2051270029 @default.
• W2433804878 hasRelatedWork W2082293200 @default.
• W2433804878 hasRelatedWork W2137307547 @default.
• W2433804878 hasRelatedWork W2371413910 @default.
• W2433804878 hasRelatedWork W2380293314 @default.
• W2433804878 hasRelatedWork W2943188944 @default.
• W2433804878 hasRelatedWork W3008690834 @default.
• W2433804878 hasRelatedWork W3082440218 @default.
• W2433804878 hasRelatedWork W4242480814 @default.
• W2433804878 hasRelatedWork W4285802202 @default.
• W2433804878 hasVolume "26" @default.
• W2433804878 isParatext "false" @default.

• next