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- W2434682133 abstract "This work details the development and validation of a variant of the “Berg model for reactive sputtering” that is capable of predicting the chemical valence state of reactively co-sputtered Mo-Ge-O thin films." @default.
- W2434682133 created "2016-06-24" @default.
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- W2434682133 date "2016-01-01" @default.
- W2434682133 modified "2023-09-26" @default.
- W2434682133 title "Modeling and simulation of reactive magnetron co-sputtering for mixed oxide coatings" @default.
- W2434682133 doi "https://doi.org/10.1364/oic.2016.wb.6" @default.
- W2434682133 hasPublicationYear "2016" @default.
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