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- W245804517 abstract "The direct readability of code marks printed using a new exposure system was investigated. In the new exposure system, code-mark patterns were printed using LEDs as exposure sources and squared optical-fiber ends as code-mark elements. A 10 × 10 fiber matrix was fabricated, and light emitted from each LED was led to each fiber. Because gaps appeared between the code-mark cells, a long exposure time was adopted, and the gaps between cells were eliminated by giving an overdose of light. After code-mark patterns were stably printed, their readability was investigated using a commercial code-mark reader. It was found that all the printed code marks were readable without errors. In concrete, same 100 identical marks printed on a wafer were readable. Moreover, six kinds of marks were repeatedly detected more than 100 times with no reading errors." @default.
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- W245804517 date "2015-05-22" @default.
- W245804517 modified "2023-09-26" @default.
- W245804517 title "Readability dependence on lithography conditions for printing code marks using a squared optical fiber matrix and light-emitting diodes" @default.
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- W245804517 doi "https://doi.org/10.7567/jjap.54.06fp11" @default.
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