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- W2460776787 abstract "The effects of high dose (≥1×1016/cm2) phosphorus ion implantation into (111), (100) and (110) silicon substrates have been investigated as a function of dose rate (10~550 µA/cm2) and annealing temperature with regard to phosphorus activation and residual damage. When the wafer is in poor thermal contact with the holder, the temperature during implantation rises to around 800°C under the maximum dose rate. The effect of dose rate on the increase in defect density and carrier activation is observed in connection with the effect of temperature rise. Wafer orientation effects are most effectively detected in the (100) wafers for carrier activation and disorder recovery at temperatures below 800°C." @default.
- W2460776787 created "2016-07-22" @default.
- W2460776787 creator A5011217966 @default.
- W2460776787 creator A5015349400 @default.
- W2460776787 creator A5031780212 @default.
- W2460776787 creator A5036697156 @default.
- W2460776787 creator A5085127234 @default.
- W2460776787 date "1977-01-01" @default.
- W2460776787 modified "2023-09-27" @default.
- W2460776787 title "Effects of High Dose Rate Phosphorus Implantation into Silicon" @default.
- W2460776787 doi "https://doi.org/10.7567/ssdm.1977.a-4-2" @default.
- W2460776787 hasPublicationYear "1977" @default.
- W2460776787 type Work @default.
- W2460776787 sameAs 2460776787 @default.
- W2460776787 citedByCount "0" @default.
- W2460776787 crossrefType "proceedings-article" @default.
- W2460776787 hasAuthorship W2460776787A5011217966 @default.
- W2460776787 hasAuthorship W2460776787A5015349400 @default.
- W2460776787 hasAuthorship W2460776787A5031780212 @default.
- W2460776787 hasAuthorship W2460776787A5036697156 @default.
- W2460776787 hasAuthorship W2460776787A5085127234 @default.
- W2460776787 hasConcept C113196181 @default.
- W2460776787 hasConcept C145148216 @default.
- W2460776787 hasConcept C159985019 @default.
- W2460776787 hasConcept C160671074 @default.
- W2460776787 hasConcept C178790620 @default.
- W2460776787 hasConcept C185592680 @default.
- W2460776787 hasConcept C191897082 @default.
- W2460776787 hasConcept C192562407 @default.
- W2460776787 hasConcept C2777855556 @default.
- W2460776787 hasConcept C41823505 @default.
- W2460776787 hasConcept C43617362 @default.
- W2460776787 hasConcept C49040817 @default.
- W2460776787 hasConcept C510538283 @default.
- W2460776787 hasConcept C544956773 @default.
- W2460776787 hasConceptScore W2460776787C113196181 @default.
- W2460776787 hasConceptScore W2460776787C145148216 @default.
- W2460776787 hasConceptScore W2460776787C159985019 @default.
- W2460776787 hasConceptScore W2460776787C160671074 @default.
- W2460776787 hasConceptScore W2460776787C178790620 @default.
- W2460776787 hasConceptScore W2460776787C185592680 @default.
- W2460776787 hasConceptScore W2460776787C191897082 @default.
- W2460776787 hasConceptScore W2460776787C192562407 @default.
- W2460776787 hasConceptScore W2460776787C2777855556 @default.
- W2460776787 hasConceptScore W2460776787C41823505 @default.
- W2460776787 hasConceptScore W2460776787C43617362 @default.
- W2460776787 hasConceptScore W2460776787C49040817 @default.
- W2460776787 hasConceptScore W2460776787C510538283 @default.
- W2460776787 hasConceptScore W2460776787C544956773 @default.
- W2460776787 hasLocation W24607767871 @default.
- W2460776787 hasOpenAccess W2460776787 @default.
- W2460776787 hasPrimaryLocation W24607767871 @default.
- W2460776787 hasRelatedWork W1969648874 @default.
- W2460776787 hasRelatedWork W1970804267 @default.
- W2460776787 hasRelatedWork W1991308464 @default.
- W2460776787 hasRelatedWork W1996201697 @default.
- W2460776787 hasRelatedWork W2010395432 @default.
- W2460776787 hasRelatedWork W2018518093 @default.
- W2460776787 hasRelatedWork W2023321686 @default.
- W2460776787 hasRelatedWork W2025706092 @default.
- W2460776787 hasRelatedWork W2036793327 @default.
- W2460776787 hasRelatedWork W2056629582 @default.
- W2460776787 hasRelatedWork W2075818797 @default.
- W2460776787 hasRelatedWork W2077958000 @default.
- W2460776787 hasRelatedWork W2078824392 @default.
- W2460776787 hasRelatedWork W2081423814 @default.
- W2460776787 hasRelatedWork W2105742036 @default.
- W2460776787 hasRelatedWork W2129756319 @default.
- W2460776787 hasRelatedWork W2181936889 @default.
- W2460776787 hasRelatedWork W2750140361 @default.
- W2460776787 hasRelatedWork W2897757204 @default.
- W2460776787 hasRelatedWork W347610013 @default.
- W2460776787 isParatext "false" @default.
- W2460776787 isRetracted "false" @default.
- W2460776787 magId "2460776787" @default.
- W2460776787 workType "article" @default.