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- W2461001446 abstract "The relationship between the microstructure of WSi0.6N films and the barrier property against Copper (Cu) diffusion is discussed in this paper. While WSi0.6N is amorphous below 850° C, W microcrystals in amorphous WSiN occur at 850° C. Their average grain sizes increase from 3 nm to 8 nm and their numerical densities also increase from 200/µ m2 to 7400/µ m2 at temperatures ranging from 850° C to 880° C. From the X-ray photoelectron spectroscopy (XPS) measurements, it is thought that the W of Si–W bonds in WSiN films is transformed into metallic W. The amount of Cu that diffused through the WSiN layer into Si was calculated by integrating the depth profiles of Cu measured using secondary ion mass spectroscopy (SIMS). The activation energy of the diffused Cu was constant at 2.8 eV in the temperature range of 700–900° C. Consequently, the excellent barrier property is thought to be due to the absence of continuous grain boundaries throughout the film where Cu atoms can easily migrate. That is, the W microcrystal formation does not change the Cu diffusion mechanism up to 900° C, and the Cu diffusion is controlled by diffusion of it in an amorphous matrix." @default.
- W2461001446 created "2016-07-22" @default.
- W2461001446 creator A5009771437 @default.
- W2461001446 creator A5015909183 @default.
- W2461001446 creator A5076942087 @default.
- W2461001446 creator A5087307383 @default.
- W2461001446 date "1996-01-01" @default.
- W2461001446 modified "2023-09-24" @default.
- W2461001446 title "Correlation of W-Si-N Film Microstructure with Barrier Performance against Cu Diffusion" @default.
- W2461001446 doi "https://doi.org/10.7567/ssdm.1996.pd-3-2" @default.
- W2461001446 hasPublicationYear "1996" @default.
- W2461001446 type Work @default.
- W2461001446 sameAs 2461001446 @default.
- W2461001446 citedByCount "0" @default.
- W2461001446 crossrefType "proceedings-article" @default.
- W2461001446 hasAuthorship W2461001446A5009771437 @default.
- W2461001446 hasAuthorship W2461001446A5015909183 @default.
- W2461001446 hasAuthorship W2461001446A5076942087 @default.
- W2461001446 hasAuthorship W2461001446A5087307383 @default.
- W2461001446 hasConcept C113196181 @default.
- W2461001446 hasConcept C121332964 @default.
- W2461001446 hasConcept C127413603 @default.
- W2461001446 hasConcept C147789679 @default.
- W2461001446 hasConcept C171250308 @default.
- W2461001446 hasConcept C175708663 @default.
- W2461001446 hasConcept C185592680 @default.
- W2461001446 hasConcept C191897082 @default.
- W2461001446 hasConcept C192562407 @default.
- W2461001446 hasConcept C2778836790 @default.
- W2461001446 hasConcept C2779227376 @default.
- W2461001446 hasConcept C42360764 @default.
- W2461001446 hasConcept C43617362 @default.
- W2461001446 hasConcept C47908070 @default.
- W2461001446 hasConcept C544778455 @default.
- W2461001446 hasConcept C56052488 @default.
- W2461001446 hasConcept C69357855 @default.
- W2461001446 hasConcept C8010536 @default.
- W2461001446 hasConcept C87976508 @default.
- W2461001446 hasConcept C95121573 @default.
- W2461001446 hasConcept C97355855 @default.
- W2461001446 hasConceptScore W2461001446C113196181 @default.
- W2461001446 hasConceptScore W2461001446C121332964 @default.
- W2461001446 hasConceptScore W2461001446C127413603 @default.
- W2461001446 hasConceptScore W2461001446C147789679 @default.
- W2461001446 hasConceptScore W2461001446C171250308 @default.
- W2461001446 hasConceptScore W2461001446C175708663 @default.
- W2461001446 hasConceptScore W2461001446C185592680 @default.
- W2461001446 hasConceptScore W2461001446C191897082 @default.
- W2461001446 hasConceptScore W2461001446C192562407 @default.
- W2461001446 hasConceptScore W2461001446C2778836790 @default.
- W2461001446 hasConceptScore W2461001446C2779227376 @default.
- W2461001446 hasConceptScore W2461001446C42360764 @default.
- W2461001446 hasConceptScore W2461001446C43617362 @default.
- W2461001446 hasConceptScore W2461001446C47908070 @default.
- W2461001446 hasConceptScore W2461001446C544778455 @default.
- W2461001446 hasConceptScore W2461001446C56052488 @default.
- W2461001446 hasConceptScore W2461001446C69357855 @default.
- W2461001446 hasConceptScore W2461001446C8010536 @default.
- W2461001446 hasConceptScore W2461001446C87976508 @default.
- W2461001446 hasConceptScore W2461001446C95121573 @default.
- W2461001446 hasConceptScore W2461001446C97355855 @default.
- W2461001446 hasLocation W24610014461 @default.
- W2461001446 hasOpenAccess W2461001446 @default.
- W2461001446 hasPrimaryLocation W24610014461 @default.
- W2461001446 hasRelatedWork W2010674983 @default.
- W2461001446 hasRelatedWork W2011665786 @default.
- W2461001446 hasRelatedWork W2026376467 @default.
- W2461001446 hasRelatedWork W2029064261 @default.
- W2461001446 hasRelatedWork W2032917906 @default.
- W2461001446 hasRelatedWork W2033702228 @default.
- W2461001446 hasRelatedWork W2034033481 @default.
- W2461001446 hasRelatedWork W2076677959 @default.
- W2461001446 hasRelatedWork W2089511021 @default.
- W2461001446 hasRelatedWork W2158381191 @default.
- W2461001446 hasRelatedWork W2196467334 @default.
- W2461001446 hasRelatedWork W2292145744 @default.
- W2461001446 hasRelatedWork W2317097230 @default.
- W2461001446 hasRelatedWork W2602736016 @default.
- W2461001446 hasRelatedWork W2770976862 @default.
- W2461001446 hasRelatedWork W2790214760 @default.
- W2461001446 hasRelatedWork W2793370049 @default.
- W2461001446 hasRelatedWork W2887352973 @default.
- W2461001446 hasRelatedWork W3008106521 @default.
- W2461001446 hasRelatedWork W3033923135 @default.
- W2461001446 isParatext "false" @default.
- W2461001446 isRetracted "false" @default.
- W2461001446 magId "2461001446" @default.
- W2461001446 workType "article" @default.