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- W2462192843 abstract "Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge23Sb7S70 chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2×106 were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices." @default.
- W2462192843 created "2016-07-22" @default.
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- W2462192843 date "2016-06-29" @default.
- W2462192843 modified "2023-10-10" @default.
- W2462192843 title "Low-loss photonic device in Ge–Sb–S chalcogenide glass" @default.
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- W2462192843 doi "https://doi.org/10.1364/ol.41.003090" @default.
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