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- W2463041982 abstract "Abstract Interfacial properties of n-GaAs metal-oxide-semiconductor (MOSCAPs) with the gate dielectrics of HfO2/Al2O3, Hf0.8Al0.2Ox and Hf0.5Al0.5Ox are investigated. The results reveal that Hf0.5Al0.5Ox has larger permittivity and lower interface trap density than that of HfO2/Al2O3. In order to explain the result from the physical perspective, the XPS tests of all three samples are performed. It is found that the main reason to form interface trap of three samples treated with 500 °C post-deposition annealing, is attributed to the interfacial component of Ga2O3 and The Hf0.5Al0.5Ox dielectric is beneficial to reducing the formation of Ga2O3." @default.
- W2463041982 created "2016-07-22" @default.
- W2463041982 creator A5045888183 @default.
- W2463041982 creator A5053645746 @default.
- W2463041982 creator A5055887546 @default.
- W2463041982 creator A5059424708 @default.
- W2463041982 creator A5064840674 @default.
- W2463041982 date "2016-11-01" @default.
- W2463041982 modified "2023-09-28" @default.
- W2463041982 title "Comparative study of atomic-layer-deposited HfO2/Al2O3, Hf0.8Al0.2Ox and Hf0.5Al0.5Ox on N-GaAs" @default.
- W2463041982 cites W1976868005 @default.
- W2463041982 cites W2002465589 @default.
- W2463041982 cites W2040050934 @default.
- W2463041982 cites W2078199884 @default.
- W2463041982 cites W2093196984 @default.
- W2463041982 cites W2144496401 @default.
- W2463041982 cites W2222048593 @default.
- W2463041982 doi "https://doi.org/10.1016/j.spmi.2016.07.002" @default.
- W2463041982 hasPublicationYear "2016" @default.
- W2463041982 type Work @default.
- W2463041982 sameAs 2463041982 @default.
- W2463041982 citedByCount "2" @default.
- W2463041982 countsByYear W24630419822019 @default.
- W2463041982 countsByYear W24630419822021 @default.
- W2463041982 crossrefType "journal-article" @default.
- W2463041982 hasAuthorship W2463041982A5045888183 @default.
- W2463041982 hasAuthorship W2463041982A5053645746 @default.
- W2463041982 hasAuthorship W2463041982A5055887546 @default.
- W2463041982 hasAuthorship W2463041982A5059424708 @default.
- W2463041982 hasAuthorship W2463041982A5064840674 @default.
- W2463041982 hasConcept C108225325 @default.
- W2463041982 hasConcept C119599485 @default.
- W2463041982 hasConcept C127413603 @default.
- W2463041982 hasConcept C133386390 @default.
- W2463041982 hasConcept C159985019 @default.
- W2463041982 hasConcept C165801399 @default.
- W2463041982 hasConcept C166972891 @default.
- W2463041982 hasConcept C168651791 @default.
- W2463041982 hasConcept C171250308 @default.
- W2463041982 hasConcept C172385210 @default.
- W2463041982 hasConcept C175708663 @default.
- W2463041982 hasConcept C191897082 @default.
- W2463041982 hasConcept C192562407 @default.
- W2463041982 hasConcept C2777855556 @default.
- W2463041982 hasConcept C2779227376 @default.
- W2463041982 hasConcept C2779851234 @default.
- W2463041982 hasConcept C42360764 @default.
- W2463041982 hasConcept C49040817 @default.
- W2463041982 hasConcept C544153396 @default.
- W2463041982 hasConcept C69544855 @default.
- W2463041982 hasConceptScore W2463041982C108225325 @default.
- W2463041982 hasConceptScore W2463041982C119599485 @default.
- W2463041982 hasConceptScore W2463041982C127413603 @default.
- W2463041982 hasConceptScore W2463041982C133386390 @default.
- W2463041982 hasConceptScore W2463041982C159985019 @default.
- W2463041982 hasConceptScore W2463041982C165801399 @default.
- W2463041982 hasConceptScore W2463041982C166972891 @default.
- W2463041982 hasConceptScore W2463041982C168651791 @default.
- W2463041982 hasConceptScore W2463041982C171250308 @default.
- W2463041982 hasConceptScore W2463041982C172385210 @default.
- W2463041982 hasConceptScore W2463041982C175708663 @default.
- W2463041982 hasConceptScore W2463041982C191897082 @default.
- W2463041982 hasConceptScore W2463041982C192562407 @default.
- W2463041982 hasConceptScore W2463041982C2777855556 @default.
- W2463041982 hasConceptScore W2463041982C2779227376 @default.
- W2463041982 hasConceptScore W2463041982C2779851234 @default.
- W2463041982 hasConceptScore W2463041982C42360764 @default.
- W2463041982 hasConceptScore W2463041982C49040817 @default.
- W2463041982 hasConceptScore W2463041982C544153396 @default.
- W2463041982 hasConceptScore W2463041982C69544855 @default.
- W2463041982 hasFunder F4320335777 @default.
- W2463041982 hasLocation W24630419821 @default.
- W2463041982 hasOpenAccess W2463041982 @default.
- W2463041982 hasPrimaryLocation W24630419821 @default.
- W2463041982 hasRelatedWork W1975576540 @default.
- W2463041982 hasRelatedWork W1986618891 @default.
- W2463041982 hasRelatedWork W2001410963 @default.
- W2463041982 hasRelatedWork W2004634067 @default.
- W2463041982 hasRelatedWork W2081793759 @default.
- W2463041982 hasRelatedWork W2141302310 @default.
- W2463041982 hasRelatedWork W2399200351 @default.
- W2463041982 hasRelatedWork W2461249735 @default.
- W2463041982 hasRelatedWork W2488245673 @default.
- W2463041982 hasRelatedWork W2523592873 @default.
- W2463041982 hasRelatedWork W2558306557 @default.
- W2463041982 hasRelatedWork W2803974355 @default.
- W2463041982 hasRelatedWork W2809089816 @default.
- W2463041982 hasRelatedWork W2949028095 @default.
- W2463041982 hasRelatedWork W2949275083 @default.
- W2463041982 hasRelatedWork W2969694922 @default.
- W2463041982 hasRelatedWork W2972420467 @default.
- W2463041982 hasRelatedWork W3012540678 @default.
- W2463041982 hasRelatedWork W3127253772 @default.
- W2463041982 hasRelatedWork W802944959 @default.
- W2463041982 isParatext "false" @default.
- W2463041982 isRetracted "false" @default.
- W2463041982 magId "2463041982" @default.
- W2463041982 workType "article" @default.