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- W2464734669 abstract "Achieving extended lifetimes in discharge- excited ArF excimer lasers lias been an important issue for industrial applications. This paper reports that an ArF excimer laser with a new gas purifier, which has a long gas-life-time of more than 1 × 108 shots, was developed." @default.
- W2464734669 created "2016-07-22" @default.
- W2464734669 creator A5012328920 @default.
- W2464734669 creator A5012801775 @default.
- W2464734669 creator A5049413643 @default.
- W2464734669 creator A5050693160 @default.
- W2464734669 date "1993-05-02" @default.
- W2464734669 modified "2023-09-24" @default.
- W2464734669 title "Long gas lifetime discharge excited ArF excimer laser" @default.
- W2464734669 hasPublicationYear "1993" @default.
- W2464734669 type Work @default.
- W2464734669 sameAs 2464734669 @default.
- W2464734669 citedByCount "0" @default.
- W2464734669 crossrefType "proceedings-article" @default.
- W2464734669 hasAuthorship W2464734669A5012328920 @default.
- W2464734669 hasAuthorship W2464734669A5012801775 @default.
- W2464734669 hasAuthorship W2464734669A5049413643 @default.
- W2464734669 hasAuthorship W2464734669A5050693160 @default.
- W2464734669 hasConcept C100536367 @default.
- W2464734669 hasConcept C120665830 @default.
- W2464734669 hasConcept C121332964 @default.
- W2464734669 hasConcept C181500209 @default.
- W2464734669 hasConcept C184779094 @default.
- W2464734669 hasConcept C192562407 @default.
- W2464734669 hasConcept C200649887 @default.
- W2464734669 hasConcept C2779367622 @default.
- W2464734669 hasConcept C2780477314 @default.
- W2464734669 hasConcept C39432304 @default.
- W2464734669 hasConcept C49040817 @default.
- W2464734669 hasConcept C520434653 @default.
- W2464734669 hasConcept C74561354 @default.
- W2464734669 hasConceptScore W2464734669C100536367 @default.
- W2464734669 hasConceptScore W2464734669C120665830 @default.
- W2464734669 hasConceptScore W2464734669C121332964 @default.
- W2464734669 hasConceptScore W2464734669C181500209 @default.
- W2464734669 hasConceptScore W2464734669C184779094 @default.
- W2464734669 hasConceptScore W2464734669C192562407 @default.
- W2464734669 hasConceptScore W2464734669C200649887 @default.
- W2464734669 hasConceptScore W2464734669C2779367622 @default.
- W2464734669 hasConceptScore W2464734669C2780477314 @default.
- W2464734669 hasConceptScore W2464734669C39432304 @default.
- W2464734669 hasConceptScore W2464734669C49040817 @default.
- W2464734669 hasConceptScore W2464734669C520434653 @default.
- W2464734669 hasConceptScore W2464734669C74561354 @default.
- W2464734669 hasLocation W24647346691 @default.
- W2464734669 hasOpenAccess W2464734669 @default.
- W2464734669 hasPrimaryLocation W24647346691 @default.
- W2464734669 hasRelatedWork W1981118902 @default.
- W2464734669 hasRelatedWork W1994245270 @default.
- W2464734669 hasRelatedWork W2006453210 @default.
- W2464734669 hasRelatedWork W2010208180 @default.
- W2464734669 hasRelatedWork W2021540365 @default.
- W2464734669 hasRelatedWork W2058968604 @default.
- W2464734669 hasRelatedWork W2324520734 @default.
- W2464734669 hasRelatedWork W2383133536 @default.
- W2464734669 hasRelatedWork W2461194697 @default.
- W2464734669 hasRelatedWork W2534205027 @default.
- W2464734669 hasRelatedWork W2536490099 @default.
- W2464734669 hasRelatedWork W2999026814 @default.
- W2464734669 hasRelatedWork W3000352167 @default.
- W2464734669 hasRelatedWork W3007526181 @default.
- W2464734669 hasRelatedWork W3041122850 @default.
- W2464734669 hasRelatedWork W3097173296 @default.
- W2464734669 hasRelatedWork W3188170025 @default.
- W2464734669 hasRelatedWork W99845768 @default.
- W2464734669 hasRelatedWork W2817294436 @default.
- W2464734669 hasRelatedWork W2877240377 @default.
- W2464734669 isParatext "false" @default.
- W2464734669 isRetracted "false" @default.
- W2464734669 magId "2464734669" @default.
- W2464734669 workType "article" @default.