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- W2467046328 abstract "The present work addresses the investigation of high-? dielectrics and their applicability in CMOS-devices, using metal-gate electrodes. The contents firstly include the deposition of zirconium dioxide and hafnium dioxide from the gas phase, using organometallic precursors, and their physico-chemical characterization. Furthermore, these material systems are investigated regarding their thermodynamical stability. In the following, MOS-capacitors are fabricated by the selective deposition of gate electrodes made from aluminum, molybdenum, nickel, or titanium-nitride, and characterized regarding their electrical behavior. Results within this work demonstrate that well balanced and correctly applied annealing of the devices clearly improves electrical behavior. We attribute these materials high potential to be applied in near-future CMOS-technology." @default.
- W2467046328 created "2016-07-22" @default.
- W2467046328 creator A5079640986 @default.
- W2467046328 date "2008-11-25" @default.
- W2467046328 modified "2023-09-23" @default.
- W2467046328 title "High-k/Metal-gate Devices for Future CMOS Technology" @default.
- W2467046328 hasPublicationYear "2008" @default.
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