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- W2468156371 abstract "Even though alloys are used widely for integrated circuit metallization, laser photoiytic depositions ot conductors have focused on pure metals,1 and, with the exception of Ehrlich's work on Ti–Al deposits,2 little attention has been paid to the deposition of alloys. In this experiment we wished to demonstrate the deposition of an alloy by photolysis of a binary mixture of precursors (dimethylzinc and trimethylaluminum) and, in particular, the deposition of an alloy by photolysis of a mixture containing one nominally transparent precursor (trimethylaluminum). Film deposition kinetics were monitored as an initial probe of the alloy deposition mechanism." @default.
- W2468156371 created "2016-07-22" @default.
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- W2468156371 date "1986-01-01" @default.
- W2468156371 modified "2023-09-25" @default.
- W2468156371 title "Laser photolytic deposition of alloys: 257-nm photolysis of trimethylaluminum-dimethylzinc mixtures" @default.
- W2468156371 cites W1968106927 @default.
- W2468156371 doi "https://doi.org/10.1364/cleo.1986.tuo5" @default.
- W2468156371 hasPublicationYear "1986" @default.
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