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- W2468408478 abstract "This paper presents design, analysis and simulation of MEMS based micro cantilevers of various shapes, to analyze their sensitivity. The analysis is done using FEM Tool (Comsol Multiphysics 4.3).The analytical model of Cantilevers of various shapes are analyzed and the construction process is discussed in this paper. The change in sensitivity with the change in shape is observed." @default.
- W2468408478 created "2016-07-22" @default.
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- W2468408478 date "2016-05-25" @default.
- W2468408478 modified "2023-09-24" @default.
- W2468408478 title "DESIGN AND SIMULATION OF HIGH SENSITIVITY MEMS CANTILEVERS" @default.
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- W2468408478 doi "https://doi.org/10.15623/ijret.2016.0517012" @default.
- W2468408478 hasPublicationYear "2016" @default.
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