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- W2469968458 abstract "Today in projection lithography the loss in useful resolution stems primarily from the problem of process control. Unavoidable variations in process parameters produce either unacceptable variations in resist linewidth, or result in unresolved features-lines missing or spaces not cleared. In this paper simulation is used to perform quantitative studies on the sensitivity of critical dimensions of positive resist profiles with respect to variations in resist thickness T, illumination dose and development time tdev. A modified version of the simulation program SAMPLE was used.1) The results obtained show that: 1) In most cases exposure and development time trade off with little effect on linewidth control; 2) Greater linewidth control may be achieved at the expense of minimum linewidth; 3) The use of post-exposure bake generally improves linewidth control, and, significantly, resolution on aluminum substrates with steps; 4) Linewidth control and practical resolution are drastically increased by planarization and elimination of reflections; a combination of both techniques can extend lithography to the sub-micron regime." @default.
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- W2469968458 date "1982-01-01" @default.
- W2469968458 modified "2023-09-23" @default.
- W2469968458 title "Process Parameter Control in Optical Lithography" @default.
- W2469968458 doi "https://doi.org/10.7567/ssdm.1982.a-5-6" @default.
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