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• W2470383626 endingPage "19126" @default.
• W2470383626 startingPage "19119" @default.
• W2470383626 abstract "Exfoliated molybdenum disulfide (MoS2) is shown to chemically oxidize in a layered manner upon exposure to a remote O2 plasma. X-ray photoelectron spectroscopy (XPS), low energy electron diffraction (LEED), and atomic force microscopy (AFM) are employed to characterize the surface chemistry, structure, and topography of the oxidation process and indicate that the oxidation mainly occurs on the topmost layer without altering the chemical composition of underlying layer. The formation of S-O bonds upon short, remote plasma exposure pins the surface Fermi level to the conduction band edge, while the MoOx formation at high temperature modulates the Fermi level toward the valence band through band alignment. A uniform coverage of monolayer amorphous MoO3 is obtained after 5 min or longer remote O2 plasma exposure at 200 °C, and the MoO3 can be completely removed by annealing at 500 °C, leaving a clean ordered MoS2 lattice structure as verified by XPS, LEED, AFM, and scanning tunneling microscopy. This work shows that a remote O2 plasma can be useful for both surface functionalization and a controlled thinning method for MoS2 device fabrication processes." @default.
• W2470383626 created "2016-07-22" @default.
• W2470383626 creator A5022477506 @default.
• W2470383626 creator A5035976373 @default.
• W2470383626 creator A5041792310 @default.
• W2470383626 creator A5051486872 @default.
• W2470383626 creator A5069693086 @default.
• W2470383626 creator A5081690749 @default.
• W2470383626 date "2016-07-14" @default.
• W2470383626 modified "2023-10-02" @default.
• W2470383626 title "Remote Plasma Oxidation and Atomic Layer Etching of MoS₂" @default.
• W2470383626 cites W1528619378 @default.
• W2470383626 cites W1868805735 @default.
• W2470383626 cites W1967350711 @default.
• W2470383626 cites W1982876375 @default.
• W2470383626 cites W1989110350 @default.
• W2470383626 cites W1992472539 @default.
• W2470383626 cites W1993002905 @default.
• W2470383626 cites W1993905249 @default.
• W2470383626 cites W1993916317 @default.
• W2470383626 cites W2002973902 @default.
• W2470383626 cites W2019629289 @default.
• W2470383626 cites W2020156088 @default.
• W2470383626 cites W2020600888 @default.
• W2470383626 cites W2021994802 @default.
• W2470383626 cites W2029456925 @default.
• W2470383626 cites W2030547735 @default.
• W2470383626 cites W2032811141 @default.
• W2470383626 cites W2045525154 @default.
• W2470383626 cites W2050211069 @default.
• W2470383626 cites W2063730890 @default.
• W2470383626 cites W2069132984 @default.
• W2470383626 cites W2072858607 @default.
• W2470383626 cites W2076727790 @default.
• W2470383626 cites W2077348258 @default.
• W2470383626 cites W2088894829 @default.
• W2470383626 cites W2089722667 @default.
• W2470383626 cites W2092440676 @default.
• W2470383626 cites W2093681061 @default.
• W2470383626 cites W2094679986 @default.
• W2470383626 cites W2095024379 @default.
• W2470383626 cites W2099603260 @default.
• W2470383626 cites W2100753771 @default.
• W2470383626 cites W2100796417 @default.
• W2470383626 cites W2115254291 @default.
• W2470383626 cites W2116294656 @default.
• W2470383626 cites W2119110666 @default.
• W2470383626 cites W2122195656 @default.
• W2470383626 cites W2134233006 @default.
• W2470383626 cites W2159368709 @default.
• W2470383626 cites W2160539766 @default.
• W2470383626 cites W2275203147 @default.
• W2470383626 cites W2316680445 @default.
• W2470383626 cites W2318900135 @default.
• W2470383626 cites W2320406738 @default.
• W2470383626 cites W2324839689 @default.
• W2470383626 cites W2329895733 @default.
• W2470383626 cites W2335685603 @default.
• W2470383626 cites W2374970305 @default.
• W2470383626 cites W2464519884 @default.
• W2470383626 cites W2950610937 @default.
• W2470383626 cites W3098006072 @default.
• W2470383626 cites W3101929953 @default.
• W2470383626 cites W3105065576 @default.
• W2470383626 doi "https://doi.org/10.1021/acsami.6b04719" @default.
• W2470383626 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/27386734" @default.
• W2470383626 hasPublicationYear "2016" @default.
• W2470383626 type Work @default.
• W2470383626 sameAs 2470383626 @default.
• W2470383626 citedByCount "135" @default.
• W2470383626 countsByYear W24703836262016 @default.
• W2470383626 countsByYear W24703836262017 @default.
• W2470383626 countsByYear W24703836262018 @default.
• W2470383626 countsByYear W24703836262019 @default.
• W2470383626 countsByYear W24703836262020 @default.
• W2470383626 countsByYear W24703836262021 @default.
• W2470383626 countsByYear W24703836262022 @default.
• W2470383626 countsByYear W24703836262023 @default.
• W2470383626 crossrefType "journal-article" @default.
• W2470383626 hasAuthorship W2470383626A5022477506 @default.
• W2470383626 hasAuthorship W2470383626A5035976373 @default.
• W2470383626 hasAuthorship W2470383626A5041792310 @default.
• W2470383626 hasAuthorship W2470383626A5051486872 @default.
• W2470383626 hasAuthorship W2470383626A5069693086 @default.
• W2470383626 hasAuthorship W2470383626A5081690749 @default.
• W2470383626 hasConcept C100083437 @default.
• W2470383626 hasConcept C113196181 @default.
• W2470383626 hasConcept C115537861 @default.
• W2470383626 hasConcept C120665830 @default.
• W2470383626 hasConcept C121332964 @default.
• W2470383626 hasConcept C127413603 @default.
• W2470383626 hasConcept C147120987 @default.
• W2470383626 hasConcept C159985019 @default.
• W2470383626 hasConcept C171250308 @default.
• W2470383626 hasConcept C175708663 @default.
• W2470383626 hasConcept C185592680 @default.
• W2470383626 hasConcept C191897082 @default.
• W2470383626 hasConcept C192562407 @default.

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